{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T14:47:25Z","timestamp":1729608445555,"version":"3.28.0"},"reference-count":16,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2012,3]]},"DOI":"10.1109\/nems.2012.6196781","type":"proceedings-article","created":{"date-parts":[[2012,5,24]],"date-time":"2012-05-24T22:26:58Z","timestamp":1337898418000},"page":"308-311","source":"Crossref","is-referenced-by-count":0,"title":["Processing of 3D multilevel SU-8 fluidic network assisted by PerMX dry-photoresist lamination"],"prefix":"10.1109","author":[{"given":"R. Ch.","family":"Meier","sequence":"first","affiliation":[]},{"given":"V.","family":"Badilita","sequence":"additional","affiliation":[]},{"given":"U.","family":"Wallrabe","sequence":"additional","affiliation":[]},{"given":"J. G.","family":"Korvink","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"15","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/16\/1\/016"},{"key":"16","doi-asserted-by":"publisher","DOI":"10.1063\/1.3613668"},{"key":"13","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/11\/6\/317"},{"key":"14","doi-asserted-by":"publisher","DOI":"10.1039\/b310866j"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1039\/c003590d"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1039\/b712932g"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/14\/6\/008"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/16\/8\/033"},{"key":"1","doi-asserted-by":"crossref","first-page":"113","DOI":"10.1126\/science.288.5463.113","article-title":"Monolithic microfabricated valves and pumps by multilayer soft lithography","volume":"288","author":"unger","year":"2000","journal-title":"Science"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1039\/b923101c"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2005.01.012"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(04)00238-9"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/14\/7\/027"},{"key":"4","doi-asserted-by":"crossref","first-page":"499","DOI":"10.1039\/b618901f","article-title":"Low temperature bonding of PMMA and COC microfluidic substrates using UV\/ozone surface treatment","volume":"7","author":"tsao","year":"2007","journal-title":"Lab on a Chip - Miniaturisation for Chemistry and Biology"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1021\/ac9912294"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1039\/b500519a"}],"event":{"name":"2012 7th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2012,3,5]]},"location":"Kyoto, Japan","end":{"date-parts":[[2012,3,8]]}},"container-title":["2012 7th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/6189421\/6196692\/06196781.pdf?arnumber=6196781","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,20]],"date-time":"2017-06-20T19:14:19Z","timestamp":1497986059000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6196781\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012,3]]},"references-count":16,"URL":"https:\/\/doi.org\/10.1109\/nems.2012.6196781","relation":{},"subject":[],"published":{"date-parts":[[2012,3]]}}}