{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,11,1]],"date-time":"2025-11-01T13:40:05Z","timestamp":1762004405712,"version":"3.28.0"},"reference-count":12,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2012,3]]},"DOI":"10.1109\/nems.2012.6196819","type":"proceedings-article","created":{"date-parts":[[2012,5,24]],"date-time":"2012-05-24T22:26:58Z","timestamp":1337898418000},"page":"469-472","source":"Crossref","is-referenced-by-count":3,"title":["Analysis of air damping in micromachined resonators"],"prefix":"10.1109","author":[{"given":"Guoqiang","family":"Wu","sequence":"first","affiliation":[]},{"given":"Dehui","family":"Xu","sequence":"additional","affiliation":[]},{"given":"Bin","family":"Xiong","sequence":"additional","affiliation":[]},{"given":"Yinglei","family":"Ma","sequence":"additional","affiliation":[]},{"given":"Yuelin","family":"Wang","sequence":"additional","affiliation":[]},{"given":"Errong","family":"Jing","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1063\/1.3190509"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1109\/LED.2008.2000643"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2007.01.008"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1109\/TUFFC.2007.240"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1109\/SENSOR.2007.4300212"},{"journal-title":"Analysis and Design Principles of MEMS Devices","year":"2005","author":"bao","key":"6"},{"journal-title":"High-Q COMS-compatible Poly-silicon Germanium Electrostatic RF MEMS Resonators","year":"2005","author":"bircumshaw","key":"5"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/19\/7\/074003"},{"journal-title":"Theoretical and Numerical Studies of the Air Damping of Micro-Resonators in the Non-Continuum Regime","year":"2004","author":"hutcherson","key":"9"},{"key":"8","doi-asserted-by":"crossref","first-page":"28","DOI":"10.1016\/j.sna.2009.02.007","article-title":"5.4-MHz single-crystal silicon wine glass mode disk resonator with quality factor of 2 million","volume":"156","author":"lee","year":"2009","journal-title":"Sens Actuators A"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1109\/84.294325"},{"key":"12","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1016\/S0924-4247(02)00204-2","article-title":"12 MHz micromechanical bulk acoustic mode oscillator","volume":"1","author":"mattila","year":"2002","journal-title":"Sens Actuators A Phy"}],"event":{"name":"2012 7th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2012,3,5]]},"location":"Kyoto, Japan","end":{"date-parts":[[2012,3,8]]}},"container-title":["2012 7th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/6189421\/6196692\/06196819.pdf?arnumber=6196819","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,20]],"date-time":"2017-06-20T19:14:12Z","timestamp":1497986052000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6196819\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012,3]]},"references-count":12,"URL":"https:\/\/doi.org\/10.1109\/nems.2012.6196819","relation":{},"subject":[],"published":{"date-parts":[[2012,3]]}}}