{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,13]],"date-time":"2026-02-13T12:48:24Z","timestamp":1770986904081,"version":"3.50.1"},"reference-count":9,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2012,3]]},"DOI":"10.1109\/nems.2012.6196882","type":"proceedings-article","created":{"date-parts":[[2012,5,24]],"date-time":"2012-05-24T22:26:58Z","timestamp":1337898418000},"page":"747-750","source":"Crossref","is-referenced-by-count":1,"title":["Atomic layer deposited protective coatings for integrated MEMS flow sensor"],"prefix":"10.1109","author":[{"given":"Dan","family":"Li","sequence":"first","affiliation":[]},{"given":"Aziz","family":"Abdulagatov","sequence":"additional","affiliation":[]},{"given":"Fang","family":"Yang","sequence":"additional","affiliation":[]},{"given":"D. C.","family":"Zhang","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"crossref","first-page":"100","DOI":"10.1016\/S0924-4247(02)00319-9","article-title":"Atomic layer deposted protective coatings for micro-electromechanical systems","volume":"103","author":"hoivik","year":"2003","journal-title":"Sensors and Actuators A"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1021\/cr900056b"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1016\/0026-2714(84)90452-9"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1063\/1.1940727"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1063\/1.1490410"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/20\/3\/035024"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1016\/0022-0248(94)00874-4"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1016\/S0040-6090(02)01262-2"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1016\/0040-6090(93)90172-L"}],"event":{"name":"2012 7th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","location":"Kyoto, Japan","start":{"date-parts":[[2012,3,5]]},"end":{"date-parts":[[2012,3,8]]}},"container-title":["2012 7th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/6189421\/6196692\/06196882.pdf?arnumber=6196882","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,20]],"date-time":"2017-06-20T19:14:25Z","timestamp":1497986065000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6196882\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012,3]]},"references-count":9,"URL":"https:\/\/doi.org\/10.1109\/nems.2012.6196882","relation":{},"subject":[],"published":{"date-parts":[[2012,3]]}}}