{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,5]],"date-time":"2024-09-05T02:28:45Z","timestamp":1725503325417},"reference-count":6,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2013,4]]},"DOI":"10.1109\/nems.2013.6559714","type":"proceedings-article","created":{"date-parts":[[2013,7,25]],"date-time":"2013-07-25T15:29:19Z","timestamp":1374766159000},"page":"199-202","source":"Crossref","is-referenced-by-count":0,"title":["A two-dimensional silicon-on-glass actuator with dispensed polymer microlens"],"prefix":"10.1109","author":[{"given":"Pei","family":"Li","sequence":"first","affiliation":[]},{"given":"Long-Fa","family":"Pan","sequence":"additional","affiliation":[]},{"given":"Hans","family":"Zappe","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1088\/1464-4258\/8\/7\/S05"},{"key":"2","first-page":"14","article-title":"MEMS technologies for optical storage application","author":"hane","year":"2009","journal-title":"Proceedings of International Symposium on Optical Memory (The Japan Society of Applied Physics"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1109\/5.649660"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1364\/OE.20.000627"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1109\/TMAG.2006.888420"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.43.4752"}],"event":{"name":"2013 8th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2013,4,7]]},"location":"Suzhou, China","end":{"date-parts":[[2013,4,10]]}},"container-title":["The 8th Annual IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6556708\/6559668\/06559714.pdf?arnumber=6559714","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,22]],"date-time":"2017-03-22T14:38:35Z","timestamp":1490193515000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6559714\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,4]]},"references-count":6,"URL":"https:\/\/doi.org\/10.1109\/nems.2013.6559714","relation":{},"subject":[],"published":{"date-parts":[[2013,4]]}}}