{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,23]],"date-time":"2024-10-23T06:02:08Z","timestamp":1729663328522,"version":"3.28.0"},"reference-count":8,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2013,4]]},"DOI":"10.1109\/nems.2013.6559732","type":"proceedings-article","created":{"date-parts":[[2013,7,25]],"date-time":"2013-07-25T19:29:19Z","timestamp":1374780559000},"page":"282-285","source":"Crossref","is-referenced-by-count":0,"title":["Micromachined catalytic combustion hydrogen gas sensor"],"prefix":"10.1109","author":[{"family":"Xifeng Liu","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Hanpeng Dong","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Shanhong Xia","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"3","first-page":"285","article-title":"Thermal stability of high-k Si-rich Ftf02 layers grown by RF magnetron sputtering","volume":"21","author":"khomenkova","year":"2010","journal-title":"Nanotechnology \\O\\"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1021\/ac026141w"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1016\/S0026-2692(02)00153-2"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1063\/1.1520334"},{"key":"6","first-page":"211","article-title":"The effects of 02\/Ar ratio on the structure and properties of hafnium dioxide (Hf02) films","volume":"81","author":"he","year":"2006","journal-title":"Facuum"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1016\/j.diamond.2008.09.008"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1016\/j.mser.2010.12.001"},{"key":"8","doi-asserted-by":"crossref","first-page":"948","DOI":"10.1016\/j.tsf.2007.06.007","article-title":"Time dependent preferential sputtering in the H1O2 layer on Si (100)","volume":"516","author":"chang","year":"2008","journal-title":"Thin Solid Films"}],"event":{"name":"2013 8th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2013,4,7]]},"location":"Suzhou, China","end":{"date-parts":[[2013,4,10]]}},"container-title":["The 8th Annual IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6556708\/6559668\/06559732.pdf?arnumber=6559732","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,21]],"date-time":"2017-06-21T16:50:23Z","timestamp":1498063823000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6559732\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,4]]},"references-count":8,"URL":"https:\/\/doi.org\/10.1109\/nems.2013.6559732","relation":{},"subject":[],"published":{"date-parts":[[2013,4]]}}}