{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T20:09:31Z","timestamp":1729627771861,"version":"3.28.0"},"reference-count":15,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2013,4]]},"DOI":"10.1109\/nems.2013.6559737","type":"proceedings-article","created":{"date-parts":[[2013,7,25]],"date-time":"2013-07-25T19:29:19Z","timestamp":1374780559000},"page":"304-307","source":"Crossref","is-referenced-by-count":0,"title":["Hybrid lithography system for MEMS\/NEMS"],"prefix":"10.1109","author":[{"given":"Linsen","family":"Chen","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Donglin Pu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Jin Hu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yan","family":"Ye","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Pengfei Zhu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"15","doi-asserted-by":"crossref","first-page":"4999","DOI":"10.1021\/la0268348","volume":"19","author":"he","year":"2003","journal-title":"Langmuir"},{"key":"13","doi-asserted-by":"crossref","first-page":"224","DOI":"10.1039\/B712575P","volume":"4","author":"roach","year":"2008","journal-title":"Soft Matter"},{"key":"14","doi-asserted-by":"crossref","first-page":"1723","DOI":"10.1021\/la0617964","volume":"23","author":"barbieri","year":"2007","journal-title":"Langmuir"},{"key":"11","doi-asserted-by":"crossref","first-page":"413","DOI":"10.1038\/nmat1903","volume":"6","author":"sekitani","year":"0","journal-title":"Nature Materials"},{"key":"12","doi-asserted-by":"crossref","first-page":"8978","DOI":"10.1021\/la050316q","volume":"21","author":"sun","year":"2005","journal-title":"Langmuir"},{"key":"3","doi-asserted-by":"crossref","first-page":"553","DOI":"10.1016\/j.surfcoat.2005.12.006","volume":"201","author":"lee","year":"2006","journal-title":"Surf Coat Tech"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1002\/lpor.200900018"},{"key":"1","doi-asserted-by":"crossref","first-page":"511","DOI":"10.1038\/nnano.2010.101","volume":"5","author":"kolle","year":"0","journal-title":"Nature Nanotechnology"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1038\/nphoton.2010.286"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1364\/AO.48.005035"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1038\/nmat2727"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1038\/nature01937"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1038\/nnano.2006.208"},{"key":"9","doi-asserted-by":"crossref","first-page":"641","DOI":"10.1038\/nphoton.2009.189","volume":"3","author":"robert","year":"2009","journal-title":"Nature Photonics"},{"key":"8","doi-asserted-by":"crossref","first-page":"349","DOI":"10.1038\/nphoton.2011.56","volume":"5","author":"juan","year":"2011","journal-title":"Nature Photonics"}],"event":{"name":"2013 8th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2013,4,7]]},"location":"Suzhou, China","end":{"date-parts":[[2013,4,10]]}},"container-title":["The 8th Annual IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6556708\/6559668\/06559737.pdf?arnumber=6559737","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,21]],"date-time":"2017-06-21T16:50:36Z","timestamp":1498063836000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6559737\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,4]]},"references-count":15,"URL":"https:\/\/doi.org\/10.1109\/nems.2013.6559737","relation":{},"subject":[],"published":{"date-parts":[[2013,4]]}}}