{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T20:31:00Z","timestamp":1729629060330,"version":"3.28.0"},"reference-count":10,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2013,4]]},"DOI":"10.1109\/nems.2013.6559776","type":"proceedings-article","created":{"date-parts":[[2013,7,25]],"date-time":"2013-07-25T19:29:19Z","timestamp":1374780559000},"page":"486-489","source":"Crossref","is-referenced-by-count":0,"title":["A new experimental methodology using point deflection to quantify residual stress of thin polymer membrane materials in MEMS devices"],"prefix":"10.1109","author":[{"given":"Sofiane","family":"Soulimane","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Arnaud","family":"Pouydebasque","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Sebastien","family":"Bolis","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Fabrice","family":"Jacquet","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Claudine","family":"Bridoux","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Florian","family":"Dupont","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Christophe","family":"Poulain","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Stephane","family":"Moreau","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Stephane","family":"Fanget","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2011.05.005"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1557\/JMR.2003.0405"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1016\/S1567-1739(02)00155-4"},{"key":"1","doi-asserted-by":"crossref","first-page":"121","DOI":"10.1016\/j.sna.2009.12.012","article-title":"A novel diaphragm micropump actuated by conjugated polymer petals: Fabrication, modeling, and experimental results","volume":"158","author":"fang","year":"2010","journal-title":"Sensors and Actuators A"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1109\/84.475551"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1016\/0250-6874(89)87111-2"},{"key":"5","doi-asserted-by":"crossref","DOI":"10.1117\/12.908057","article-title":"Thin varifocal liquid lenses actuated below 10V for mobile phone cameras","volume":"8252","author":"pouydebasque","year":"2012","journal-title":"Proc SPIE"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1051\/epjap:2004026"},{"key":"9","doi-asserted-by":"crossref","first-page":"10501","DOI":"10.1051\/epjap:2008187","article-title":"Bulge test and a point deflection method, two technics for Themechanical characterisation of very low stiffness Freestanding films","volume":"45","author":"martins","year":"2009","journal-title":"Eur Phys J Appl Phys"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2002.800936"}],"event":{"name":"2013 8th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2013,4,7]]},"location":"Suzhou, China","end":{"date-parts":[[2013,4,10]]}},"container-title":["The 8th Annual IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6556708\/6559668\/06559776.pdf?arnumber=6559776","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,21]],"date-time":"2017-06-21T16:50:31Z","timestamp":1498063831000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6559776\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,4]]},"references-count":10,"URL":"https:\/\/doi.org\/10.1109\/nems.2013.6559776","relation":{},"subject":[],"published":{"date-parts":[[2013,4]]}}}