{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,23]],"date-time":"2024-10-23T05:23:53Z","timestamp":1729661033759,"version":"3.28.0"},"reference-count":12,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2013,4]]},"DOI":"10.1109\/nems.2013.6559820","type":"proceedings-article","created":{"date-parts":[[2013,7,25]],"date-time":"2013-07-25T15:29:19Z","timestamp":1374766159000},"page":"677-680","source":"Crossref","is-referenced-by-count":0,"title":["Fabrication of three-dimensional metallic microcomponents in fused silica by a femtosecond laser & micromoulding (FLM) method"],"prefix":"10.1109","author":[{"family":"Keyin Liu","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Yulong Zhao","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Qing Yang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Feng Chen","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Shengguan He","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Xiaole Fan","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Lei li","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Chao Shan","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Hao Bian","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1007\/s10404-004-0010-y"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1109\/TMAG.2003.816006"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1063\/1.2203335"},{"key":"1","doi-asserted-by":"crossref","first-page":"547","DOI":"10.1016\/j.sna.2006.10.023","article-title":"A micro-LCresonator fabricated by MEMS technique for high-frequency sensor applications","volume":"135","author":"le","year":"2007","journal-title":"Sensors and Actuators A"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1002\/adma.200601787"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1016\/j.mejo.2003.10.003"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1049\/ic:20060471"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1109\/LED.2011.2182601"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1007\/s00216-006-0517-z"},{"key":"8","doi-asserted-by":"crossref","first-page":"746","DOI":"10.1039\/c2lc21015k","article-title":"Rapid prototyping of threedimensional microfluidic mixers in glass by femtosecond laser direct writing","volume":"12","author":"liao","year":"2012","journal-title":"Lab Chip"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1364\/OL.30.001867"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1117\/12.869845"}],"event":{"name":"2013 8th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2013,4,7]]},"location":"Suzhou, China","end":{"date-parts":[[2013,4,10]]}},"container-title":["The 8th Annual IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6556708\/6559668\/06559820.pdf?arnumber=6559820","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,21]],"date-time":"2017-06-21T12:50:31Z","timestamp":1498049431000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6559820\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,4]]},"references-count":12,"URL":"https:\/\/doi.org\/10.1109\/nems.2013.6559820","relation":{},"subject":[],"published":{"date-parts":[[2013,4]]}}}