{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,11,6]],"date-time":"2025-11-06T05:43:20Z","timestamp":1762407800391,"version":"3.28.0"},"reference-count":7,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2013,4]]},"DOI":"10.1109\/nems.2013.6559821","type":"proceedings-article","created":{"date-parts":[[2013,7,25]],"date-time":"2013-07-25T15:29:19Z","timestamp":1374766159000},"page":"681-684","source":"Crossref","is-referenced-by-count":4,"title":["Design, simulation and fabrication of a micromachined cantilever-based flow sensor"],"prefix":"10.1109","author":[{"family":"Pei Chen","sequence":"first","affiliation":[]},{"family":"Yulong Zhao","sequence":"additional","affiliation":[]},{"family":"Yiyao Li","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"3","first-page":"1065","article-title":"Non-thermal micro flowmeters","volume":"29","author":"ze-wen","year":"0","journal-title":"Chinese Journal of Electron Devices"},{"key":"2","doi-asserted-by":"crossref","first-page":"15007","DOI":"10.1088\/0960-1317\/21\/1\/015007","article-title":"Fabracation of a cantilever-based microfluidic flow meter with nL min-1 resolution","volume":"21","author":"noeth","year":"2011","journal-title":"J Micromech Microeng"},{"doi-asserted-by":"publisher","key":"1","DOI":"10.1016\/S0955-5986(97)00019-8"},{"doi-asserted-by":"publisher","key":"7","DOI":"10.1109\/NANOMED.2009.5559117"},{"key":"6","first-page":"171","author":"hongwen","year":"1992","journal-title":"Mechanics of Materials (I"},{"doi-asserted-by":"publisher","key":"5","DOI":"10.1088\/0960-1317\/20\/3\/035024"},{"key":"4","first-page":"46","author":"kejie","year":"2002","journal-title":"Handbook of Sensor Technology"}],"event":{"name":"2013 8th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2013,4,7]]},"location":"Suzhou, China","end":{"date-parts":[[2013,4,10]]}},"container-title":["The 8th Annual IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6556708\/6559668\/06559821.pdf?arnumber=6559821","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,21]],"date-time":"2017-06-21T12:50:30Z","timestamp":1498049430000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6559821\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,4]]},"references-count":7,"URL":"https:\/\/doi.org\/10.1109\/nems.2013.6559821","relation":{},"subject":[],"published":{"date-parts":[[2013,4]]}}}