{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,23]],"date-time":"2024-10-23T03:39:04Z","timestamp":1729654744484,"version":"3.28.0"},"reference-count":20,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2013,4]]},"DOI":"10.1109\/nems.2013.6559849","type":"proceedings-article","created":{"date-parts":[[2013,7,25]],"date-time":"2013-07-25T15:29:19Z","timestamp":1374766159000},"page":"813-816","source":"Crossref","is-referenced-by-count":0,"title":["Reliability evaluation of micromirror of double S-shaped unimorph piezoelectric actuator with probabilistic approach"],"prefix":"10.1109","author":[{"given":"Wenjing","family":"Liu","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yongming","family":"Tang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Baoping","family":"Wang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"19","doi-asserted-by":"crossref","first-page":"495","DOI":"10.1016\/j.sna.2011.03.018","article-title":"A piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift","volume":"167","author":"zhu","year":"2011","journal-title":"Sensor Actuat A-Phys"},{"key":"17","doi-asserted-by":"publisher","DOI":"10.1080\/10584580802543276"},{"key":"18","first-page":"639","article-title":"PMUT array design for a handwriting input system, Micro Electro Mechanical Systems (MEMS)","author":"liao","year":"2010","journal-title":"2010 IEEE 23rd International Conference on"},{"key":"15","doi-asserted-by":"publisher","DOI":"10.1109\/TMAG.2008.2002619"},{"key":"16","doi-asserted-by":"publisher","DOI":"10.1080\/10584580903039257"},{"key":"13","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2012.12.038"},{"key":"14","doi-asserted-by":"publisher","DOI":"10.1109\/TR.2004.842089"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1117\/12.316894"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1177\/1045389X9700801205"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2006.876666"},{"key":"20","first-page":"2189","article-title":"Two-axis scanning micromirror based on a tilt-and-lateral shift-free piezoelectric actuator","author":"liu","year":"2010","journal-title":"Sensors 2010 IEEE"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(01)00814-7"},{"key":"1","doi-asserted-by":"crossref","first-page":"237","DOI":"10.1016\/S0924-4247(02)00347-3","article-title":"Endoscopic optical coherence tomographic imaging with a CMOS-MEMS micromirror","volume":"103","author":"xie","year":"2003","journal-title":"Sensors and Actuators A Physical"},{"key":"10","first-page":"217","article-title":"Durability properties of piezoelectric stack actuators under combined electro-mechanical loading","volume":"3992","author":"mitrovic","year":"2000","journal-title":"Proc SPIE-Int Soc Opt Eng"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.37.5306"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1109\/20.917646"},{"key":"5","doi-asserted-by":"crossref","first-page":"291","DOI":"10.1016\/S0924-4247(00)00347-2","article-title":"A raster-scanning full-motion video display using polysilicon micromachined mirrors","volume":"83","author":"conant","year":"2000","journal-title":"Sensor Actuat A-Phys"},{"key":"4","first-page":"6","article-title":"A flat high-frequency scanning micromirror","author":"conant","year":"2002","journal-title":"Tech Dig Solid-State Sensor and Actuator Workshop (TRF Cat No 00TRF-0001)"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1088\/0964-1726\/9\/1\/308"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1117\/12.388861"}],"event":{"name":"2013 8th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2013,4,7]]},"location":"Suzhou, China","end":{"date-parts":[[2013,4,10]]}},"container-title":["The 8th Annual IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6556708\/6559668\/06559849.pdf?arnumber=6559849","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,21]],"date-time":"2017-06-21T12:50:24Z","timestamp":1498049424000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6559849\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,4]]},"references-count":20,"URL":"https:\/\/doi.org\/10.1109\/nems.2013.6559849","relation":{},"subject":[],"published":{"date-parts":[[2013,4]]}}}