{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T16:50:48Z","timestamp":1729615848407,"version":"3.28.0"},"reference-count":14,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2013,4]]},"DOI":"10.1109\/nems.2013.6559884","type":"proceedings-article","created":{"date-parts":[[2013,7,25]],"date-time":"2013-07-25T19:29:19Z","timestamp":1374780559000},"page":"969-972","source":"Crossref","is-referenced-by-count":2,"title":["Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators"],"prefix":"10.1109","author":[{"given":"Wenjun","family":"Liao","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wenjing","family":"Liu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yongming","family":"Tang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Baobing","family":"Wang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Huikai","family":"Xie","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"13","first-page":"376","article-title":"Optimization of thermally actuated bimorph cantilevers for maximum deflection","author":"peng","year":"2003","journal-title":"Proc IEEE Nanotechnology Conf"},{"journal-title":"Microsystem Design and Fabrication","year":"2008","author":"wang","key":"14"},{"key":"11","first-page":"2189","article-title":"Two-axis scanning micromirror based on a tilt-and-lateral shift-free piezoelectric actuator","author":"liu","year":"2010","journal-title":"Sensors 2010 IEEE"},{"key":"12","first-page":"160","article-title":"Tip-tiltpistion micromirror based on symmetrical lateral-shift-free piezoelectric actuators","author":"liao","year":"2012","journal-title":"Optical MEMS and Nanophotonics (OMN"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/OMEMS.2011.6031113"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2003.815839"},{"key":"1","first-page":"86","volume":"1150","author":"hornbeck","year":"1989","journal-title":"Bistable Deformable Mirror Device"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.2010.5442325"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2012.12.038"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1364\/OE.20.027003"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/19\/9\/095012"},{"key":"4","doi-asserted-by":"crossref","first-page":"495","DOI":"10.1016\/j.sna.2011.03.018","article-title":"A piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift","volume":"167","author":"zhu","year":"2011","journal-title":"Sensors and Actuators"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1080\/10584580802543276"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1080\/10584580903039257"}],"event":{"name":"2013 8th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2013,4,7]]},"location":"Suzhou, China","end":{"date-parts":[[2013,4,10]]}},"container-title":["The 8th Annual IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6556708\/6559668\/06559884.pdf?arnumber=6559884","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,21]],"date-time":"2017-06-21T16:50:25Z","timestamp":1498063825000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6559884\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,4]]},"references-count":14,"URL":"https:\/\/doi.org\/10.1109\/nems.2013.6559884","relation":{},"subject":[],"published":{"date-parts":[[2013,4]]}}}