{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,12,27]],"date-time":"2025-12-27T10:13:46Z","timestamp":1766830426151,"version":"3.28.0"},"reference-count":14,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2013,4]]},"DOI":"10.1109\/nems.2013.6559887","type":"proceedings-article","created":{"date-parts":[[2013,7,25]],"date-time":"2013-07-25T19:29:19Z","timestamp":1374780559000},"page":"986-989","source":"Crossref","is-referenced-by-count":2,"title":["High aspect ratio etching of nanopores in PECVD SiC through AAO mask"],"prefix":"10.1109","author":[{"given":"Songmei","family":"Wu","sequence":"first","affiliation":[]},{"given":"Marc-Oliver","family":"Bammatter","sequence":"additional","affiliation":[]},{"given":"Wei","family":"Tang","sequence":"additional","affiliation":[]},{"given":"Vaida","family":"Auzelyte","sequence":"additional","affiliation":[]},{"given":"Haixia","family":"Zhang","sequence":"additional","affiliation":[]},{"given":"Juergen","family":"Brugger","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"doi-asserted-by":"publisher","key":"13","DOI":"10.1016\/S0925-3467(03)00068-5"},{"doi-asserted-by":"publisher","key":"14","DOI":"10.1088\/0022-3727\/37\/13\/012"},{"doi-asserted-by":"publisher","key":"11","DOI":"10.1063\/1.120128"},{"doi-asserted-by":"publisher","key":"12","DOI":"10.1088\/0022-3727\/36\/5\/310"},{"doi-asserted-by":"publisher","key":"3","DOI":"10.1016\/j.memsci.2009.07.027"},{"doi-asserted-by":"publisher","key":"2","DOI":"10.1007\/s00216-006-0504-4"},{"key":"1","doi-asserted-by":"crossref","first-page":"1466","DOI":"10.1126\/science.268.5216.1466","article-title":"Ordered metal nanohole arrays made by a two-step replication of honeycomb structures of anodic alumina","volume":"268","author":"masuda","year":"1995","journal-title":"Science"},{"doi-asserted-by":"publisher","key":"10","DOI":"10.1016\/j.mee.2010.11.056"},{"key":"7","article-title":"Al2O3\/W hetero-structured nanopore membranes: From native to tunable nanofluidic diodes","author":"wu","year":"0","journal-title":"unpublished"},{"doi-asserted-by":"publisher","key":"6","DOI":"10.1039\/c2nr31243c"},{"doi-asserted-by":"publisher","key":"5","DOI":"10.1116\/1.1403442"},{"doi-asserted-by":"publisher","key":"4","DOI":"10.1063\/1.125652"},{"doi-asserted-by":"publisher","key":"9","DOI":"10.1109\/NEMS.2011.6017316"},{"doi-asserted-by":"publisher","key":"8","DOI":"10.1109\/NEMS.2006.334900"}],"event":{"name":"2013 8th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2013,4,7]]},"location":"Suzhou, China","end":{"date-parts":[[2013,4,10]]}},"container-title":["The 8th Annual IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6556708\/6559668\/06559887.pdf?arnumber=6559887","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,21]],"date-time":"2017-06-21T16:50:34Z","timestamp":1498063834000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6559887\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,4]]},"references-count":14,"URL":"https:\/\/doi.org\/10.1109\/nems.2013.6559887","relation":{},"subject":[],"published":{"date-parts":[[2013,4]]}}}