{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,23]],"date-time":"2024-10-23T05:43:07Z","timestamp":1729662187836,"version":"3.28.0"},"reference-count":27,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2013,4]]},"DOI":"10.1109\/nems.2013.6559942","type":"proceedings-article","created":{"date-parts":[[2013,7,25]],"date-time":"2013-07-25T15:29:19Z","timestamp":1374766159000},"page":"1236-1239","source":"Crossref","is-referenced-by-count":1,"title":["Silicon wafer modification by laser interference"],"prefix":"10.1109","author":[{"given":"L.","family":"Zhao","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Z.","family":"Wang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"D.","family":"Wang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Z.","family":"Zhang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Y.","family":"Yu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Z.","family":"Weng","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"C.","family":"Maple","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"D.","family":"Li","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Y.","family":"Yue","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"19","doi-asserted-by":"crossref","first-page":"6575","DOI":"10.1016\/j.apsusc.2007.01.078","article-title":"Surface texturing of Si, porous Si and Ti02 by laser ablation","volume":"253","author":"mills","year":"2007","journal-title":"Applied Surface Science"},{"key":"17","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevB.30.2001"},{"key":"18","doi-asserted-by":"publisher","DOI":"10.1063\/1.123838"},{"key":"15","doi-asserted-by":"crossref","first-page":"9","DOI":"10.1007\/BF00618110","article-title":"Periodic surface structures frozen into CO 2 laser-melted quartz","volume":"29","author":"keilmann","year":"1982","journal-title":"Applied Physics A Materials Science & Processing"},{"key":"16","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevB.27.1141"},{"key":"13","doi-asserted-by":"crossref","first-page":"135","DOI":"10.1007\/BF00616609","article-title":"Observations of higher-order laser-induced surface ripples onlllgermaniurn","volume":"32","author":"fauchet","year":"1983","journal-title":"Applied Physics A Materials Science & Processing"},{"key":"14","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevLett.49.1955"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1063\/1.122241"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1063\/1.93274"},{"key":"21","doi-asserted-by":"publisher","DOI":"10.1016\/S0169-4332(00)00611-5"},{"key":"20","doi-asserted-by":"publisher","DOI":"10.1557\/JMR.2002.0148"},{"key":"22","doi-asserted-by":"publisher","DOI":"10.1557\/mrs.2011.111"},{"key":"23","doi-asserted-by":"publisher","DOI":"10.1557\/mrs2006.160"},{"key":"24","doi-asserted-by":"publisher","DOI":"10.1016\/j.mee.2008.12.043"},{"key":"25","article-title":"Laser interference nanolithography","author":"wang","year":"2008","journal-title":"Presented at Proceedings of the 3rd International Conference on Manufacturing Engineering"},{"key":"26","doi-asserted-by":"publisher","DOI":"10.1016\/j.solmat.2010.07.020"},{"key":"27","doi-asserted-by":"publisher","DOI":"10.2351\/1.2164480"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1063\/1.2724897"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1007\/s11671-009-9297-7"},{"key":"10","article-title":"Nanostructure formation upon femtosecond ablation from silicon: Effect of double pulses","author":"reif","year":"2011","journal-title":"Applied Surface Science"},{"journal-title":"Comparison of Texturing Methods for MonocrystaUme Silicon Solar Cells Using KOH and Na2C03","year":"2003","author":"sparber","key":"1"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1016\/j.optcom.2011.09.024"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1016\/j.jmatprotec.2007.11.278"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1002\/pip.667"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1016\/j.apsusc.2007.01.079"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevB.26.5366"},{"key":"8","doi-asserted-by":"crossref","first-page":"19","DOI":"10.1007\/s003390100893","article-title":"Femtosecond laser ablation of silicon-modification thresholds and morphology","volume":"74","author":"bonse","year":"2002","journal-title":"AppliedPhysics A Materials Science & Processing"}],"event":{"name":"2013 8th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2013,4,7]]},"location":"Suzhou, China","end":{"date-parts":[[2013,4,10]]}},"container-title":["The 8th Annual IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6556708\/6559668\/06559942.pdf?arnumber=6559942","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,21]],"date-time":"2017-06-21T12:50:27Z","timestamp":1498049427000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/6559942\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,4]]},"references-count":27,"URL":"https:\/\/doi.org\/10.1109\/nems.2013.6559942","relation":{},"subject":[],"published":{"date-parts":[[2013,4]]}}}