{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T17:36:24Z","timestamp":1729618584566,"version":"3.28.0"},"reference-count":14,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2015,4]]},"DOI":"10.1109\/nems.2015.7147383","type":"proceedings-article","created":{"date-parts":[[2015,7,7]],"date-time":"2015-07-07T21:44:38Z","timestamp":1436305478000},"page":"99-102","source":"Crossref","is-referenced-by-count":3,"title":["Research on slide-film damping effect to achieve a high-performance resonant pressure senor"],"prefix":"10.1109","author":[{"family":"Rongjun Cheng","sequence":"first","affiliation":[]},{"family":"Yulong Zhao","sequence":"additional","affiliation":[]},{"family":"Cun Li","sequence":"additional","affiliation":[]},{"family":"Bian Tian","sequence":"additional","affiliation":[]},{"family":"Bo Li","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/FREQ.1983.200675"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1063\/1.1765753"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/1\/4\/001"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1088\/0957-0233\/20\/9\/092001"},{"key":"ref14","volume":"8","author":"bao","year":"2000","journal-title":"Micro Mechanical Transducers Pressure Sensors Accelerometers and Gyroscopes"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/17\/12\/013"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1088\/0964-1726\/6\/5\/004"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2004.01.061"},{"key":"ref5","doi-asserted-by":"crossref","first-page":"212","DOI":"10.1016\/S0924-4247(03)00263-2","article-title":"Squeeze-film air damping of thick hole-plate","volume":"108","author":"bao","year":"2003","journal-title":"Sensors and Actuators A Physical"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(99)00065-5"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/1\/2\/004"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(98)00245-3"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1016\/0924-4247(95)00997-3"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/58.238112"}],"event":{"name":"2015 IEEE 10th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2015,4,7]]},"location":"Xi'an, China","end":{"date-parts":[[2015,4,11]]}},"container-title":["10th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/7132046\/7147342\/07147383.pdf?arnumber=7147383","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2020,10,14]],"date-time":"2020-10-14T15:44:29Z","timestamp":1602690269000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/7147383"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2015,4]]},"references-count":14,"URL":"https:\/\/doi.org\/10.1109\/nems.2015.7147383","relation":{},"subject":[],"published":{"date-parts":[[2015,4]]}}}