{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,3]],"date-time":"2025-10-03T09:31:07Z","timestamp":1759483867894,"version":"3.28.0"},"reference-count":13,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2015,4]]},"DOI":"10.1109\/nems.2015.7147384","type":"proceedings-article","created":{"date-parts":[[2015,7,7]],"date-time":"2015-07-07T17:44:38Z","timestamp":1436291078000},"page":"103-106","source":"Crossref","is-referenced-by-count":1,"title":["Development and characterization of three-axis micro-force sensor series"],"prefix":"10.1109","author":[{"family":"Yafei Qin","sequence":"first","affiliation":[]},{"family":"Yulong Zhao","sequence":"additional","affiliation":[]},{"family":"Weizhong Wang","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1634\/stemcells.2007-0228"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2009.2013387"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1016\/j.ymssp.2009.02.004"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2005.11.059"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1021\/nl103901a"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/20\/2\/025011"},{"key":"ref6","first-page":"3228","volume":"9","author":"tibrewala","year":"2009","journal-title":"Development of 3D force sensors for nanopositioning and nanomeasuring machine Sensors"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2010.03.032"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1088\/0957-0233\/22\/3\/035205"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1088\/0957-0233\/22\/5\/055103"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1016\/j.jbiomech.2011.04.032"},{"key":"ref1","first-page":"710","author":"joyce","year":"1991","journal-title":"A new force sensor incorporating forcefeedback control for interfacial force microscopy Rev Sci Instrum"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-010-1125-6"}],"event":{"name":"2015 IEEE 10th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2015,4,7]]},"location":"Xi'an, China","end":{"date-parts":[[2015,4,11]]}},"container-title":["10th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/7132046\/7147342\/07147384.pdf?arnumber=7147384","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2020,10,14]],"date-time":"2020-10-14T11:44:19Z","timestamp":1602675859000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/7147384"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2015,4]]},"references-count":13,"URL":"https:\/\/doi.org\/10.1109\/nems.2015.7147384","relation":{},"subject":[],"published":{"date-parts":[[2015,4]]}}}