{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,22]],"date-time":"2024-10-22T16:31:20Z","timestamp":1729614680520,"version":"3.28.0"},"reference-count":12,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2015,4]]},"DOI":"10.1109\/nems.2015.7147490","type":"proceedings-article","created":{"date-parts":[[2015,7,7]],"date-time":"2015-07-07T21:44:38Z","timestamp":1436305478000},"page":"553-556","source":"Crossref","is-referenced-by-count":1,"title":["One-step patterning of a flexible piezoresistive MEMS sensor by 3D direct laser writing"],"prefix":"10.1109","author":[{"given":"Georges","family":"Dubourg","sequence":"first","affiliation":[]},{"given":"Cedo","family":"Zlebic","sequence":"additional","affiliation":[]},{"given":"Jovan","family":"Matovic","sequence":"additional","affiliation":[]},{"given":"Vesna Crnojevic","family":"Bengin","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref4","doi-asserted-by":"crossref","first-page":"306","DOI":"10.1016\/j.sna.2007.10.053","article-title":"A reusable high aspect ratio parylene-C shadow mask technology for diverse micropatterning applications","volume":"145","author":"selvarasah","year":"2008","journal-title":"Sens Actuators A Phys"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/21\/9\/095021"},{"article-title":"The Measurement, Instrumentation, and Sensors: Handbook","year":"1999","author":"webster","key":"ref10"},{"key":"ref6","doi-asserted-by":"crossref","first-page":"177","DOI":"10.1007\/s00339-013-7901-2","article-title":"Ultrafast laser ablation of metal films on flexible substrates","volume":"115","author":"gallais","year":"0","journal-title":"Appl Phys A"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1021\/nl903272n"},{"key":"ref5","doi-asserted-by":"crossref","first-page":"144","DOI":"10.1016\/j.carbon.2014.11.017","article-title":"Facile fabrication of flexible all solid-state microsupercapacitor by direct laser writing of porous carbon in polyimidee","volume":"83","author":"in","year":"0","journal-title":"Carbon"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1039\/c2nr11555g"},{"key":"ref8","doi-asserted-by":"crossref","first-page":"161","DOI":"10.1016\/j.sna.2014.01.037","article-title":"Highly piezoresistive hybrid MEMS","volume":"209","author":"thuau","year":"0","journal-title":"Sensors and Actuators A"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1002\/polb.23192"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1016\/j.proeng.2014.11.300"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/ISSE.2013.6648283"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1088\/2043-6262\/3\/1\/015009"}],"event":{"name":"2015 IEEE 10th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2015,4,7]]},"location":"Xi'an, China","end":{"date-parts":[[2015,4,11]]}},"container-title":["10th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/7132046\/7147342\/07147490.pdf?arnumber=7147490","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,6,23]],"date-time":"2017-06-23T15:17:20Z","timestamp":1498231040000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/7147490\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2015,4]]},"references-count":12,"URL":"https:\/\/doi.org\/10.1109\/nems.2015.7147490","relation":{},"subject":[],"published":{"date-parts":[[2015,4]]}}}