{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,31]],"date-time":"2025-10-31T14:13:39Z","timestamp":1761920019312,"version":"3.28.0"},"reference-count":29,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2015,4]]},"DOI":"10.1109\/nems.2015.7147492","type":"proceedings-article","created":{"date-parts":[[2015,7,7]],"date-time":"2015-07-07T17:44:38Z","timestamp":1436291078000},"page":"561-565","source":"Crossref","is-referenced-by-count":27,"title":["A versatile multi-user polyimide surface micromachinning process for MEMS applications"],"prefix":"10.1109","author":[{"given":"Arpys","family":"Arevalo","sequence":"first","affiliation":[]},{"given":"E.","family":"Byas","sequence":"additional","affiliation":[]},{"given":"D.","family":"Conchouso","sequence":"additional","affiliation":[]},{"given":"D.","family":"Castro","sequence":"additional","affiliation":[]},{"given":"S.","family":"Ilyas","sequence":"additional","affiliation":[]},{"given":"I. G.","family":"Foulds","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/41.464605"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/IECON.1994.398033"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1016\/j.mee.2007.08.004"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1088\/0964-1726\/10\/6\/312"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/ICSENS.2008.4716386"},{"article-title":"Simulation of a Polyimide Based Micromirror","year":"0","author":"arevalo","key":"ref15"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1109\/TAP.2013.2241720"},{"article-title":"Simulation of a Micro-Scale Out-of-plane Compliant Mechanism","year":"0","author":"castro","key":"ref17"},{"key":"ref18","article-title":"Polyimide Thermal Micro Actuator","author":"arevalo","year":"2014","journal-title":"2014 COMSOL Cambridge England"},{"key":"ref19","first-page":"283","article-title":"Micromachined, polyimide-based devices for flexible neural interfaces","volume":"2","author":"thomas stieglitz","year":"2000"},{"key":"ref28","article-title":"SOIMUMPs design handbook","author":"cowen","year":"2011","journal-title":"MEMSCAP …"},{"key":"ref4","article-title":"Platform Isolation Using Out-of-Plane Compliant Mechanisms","author":"arevalo","year":"2014","journal-title":"2014 COMSOL Conference Boston USA"},{"key":"ref27","article-title":"PolyMUMPs design handbook","volume":"13","author":"cowen","year":"2011","journal-title":"MEMSCAP Inc Revision"},{"article-title":"Out-of-plane Platforms with Bi-directional Thermal Bimorph Actuation for Transducer Applications","year":"0","author":"conchouso","key":"ref3"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/23\/3\/035037"},{"key":"ref29","article-title":"MetalMUMPs design handbook","author":"cowen","year":"2002","journal-title":"MEMSCAP Inc"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/16\/10\/026"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/UKSim.2013.55"},{"key":"ref7","first-page":"792","article-title":"Simulation of a Low Frequency Z-Axis SU-8 Accelerometer in Coven-torWare and MEMS+","author":"carreno","year":"0"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2014.2386285"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.2011.5734652"},{"article-title":"?Heater on a Buckled Cantilever Plate for Gas Sensor Applications","year":"0","author":"carreno","key":"ref1"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1080\/17458080601024188"},{"year":"0","key":"ref22","article-title":"MEMS Acoustic Pixel"},{"article-title":"Parametric Study of Polyimide-Lead Zirconate Titanate Thin Film Cantilevers for Transducer Applications","year":"0","author":"arevalo","key":"ref21"},{"article-title":"Towards a Digital Sound Reconstruction MEMS Device: Characterization of a Single PZT Based Piezoelectric Actuator","year":"0","author":"arevalo","key":"ref24"},{"article-title":"Optimized Cantilever-to-Anchor Configuration of Buckled Cantilever Plate Structures for Transducer Applications","year":"0","author":"carreno","key":"ref23"},{"key":"ref26","article-title":"Low-cost silicon wafer dicing using a craft cutter","author":"fan","year":"2014","journal-title":"Microsystem Technologies"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1109\/TMAG.2012.2237019"}],"event":{"name":"2015 IEEE 10th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2015,4,7]]},"location":"Xi'an, China","end":{"date-parts":[[2015,4,11]]}},"container-title":["10th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/7132046\/7147342\/07147492.pdf?arnumber=7147492","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,24]],"date-time":"2017-03-24T15:22:04Z","timestamp":1490368924000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/7147492\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2015,4]]},"references-count":29,"URL":"https:\/\/doi.org\/10.1109\/nems.2015.7147492","relation":{},"subject":[],"published":{"date-parts":[[2015,4]]}}}