{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,11,28]],"date-time":"2025-11-28T18:50:32Z","timestamp":1764355832781,"version":"3.46.0"},"reference-count":5,"publisher":"IEEE","license":[{"start":{"date-parts":[[2015,4,1]],"date-time":"2015-04-01T00:00:00Z","timestamp":1427846400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2015,4,1]],"date-time":"2015-04-01T00:00:00Z","timestamp":1427846400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2015,4]]},"DOI":"10.1109\/nems.2015.7147501","type":"proceedings-article","created":{"date-parts":[[2015,7,7]],"date-time":"2015-07-07T17:44:38Z","timestamp":1436291078000},"page":"602-604","source":"Crossref","is-referenced-by-count":0,"title":["Design and measurement of MEMS capacitive ultrasonic transducer"],"prefix":"10.1109","author":[{"family":"Jing Miao","sequence":"first","affiliation":[{"name":"National Key Laboratory for Electronic Measurement Technology, North University of China, 030051 Taiyuan, China"}]},{"family":"Wenjiang Shen","sequence":"additional","affiliation":[{"name":"Key Laboratory of Nanodevices and Applications, Suzhou Institute of Nano-tech and Nano-bionics, Chinese Academy of Sciences, 215123, China"}]},{"family":"Muyu Chen","sequence":"additional","affiliation":[{"name":"Key Laboratory of Nanodevices and Applications, Suzhou Institute of Nano-tech and Nano-bionics, Chinese Academy of Sciences, 215123, China"}]},{"family":"Hui Wang","sequence":"additional","affiliation":[{"name":"Key Laboratory of Nanodevices and Applications, Suzhou Institute of Nano-tech and Nano-bionics, Chinese Academy of Sciences, 215123, China"}]},{"family":"Changde He","sequence":"additional","affiliation":[{"name":"National Key Laboratory for Electronic Measurement Technology, North University of China, 030051 Taiyuan, China"}]},{"family":"Chenyang Xue","sequence":"additional","affiliation":[{"name":"National Key Laboratory for Electronic Measurement Technology, North University of China, 030051 Taiyuan, China"}]},{"family":"Jijun Xiong","sequence":"additional","affiliation":[{"name":"National Key Laboratory for Electronic Measurement Technology, North University of China, 030051 Taiyuan, China"}]}],"member":"263","reference":[{"key":"ref4","first-page":"17","article-title":"Capacitive Micromachined Ultrasonic Transducers: Fabrication Technology","volume":"52","author":"ergun","year":"2005","journal-title":"IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1121\/1.1771617"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1016\/j.ultras.2013.04.003"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/21\/5\/054004"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/ULTSYM.1994.401810"}],"event":{"name":"2015 IEEE 10th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2015,4,7]]},"location":"Xi'an, China","end":{"date-parts":[[2015,4,11]]}},"container-title":["10th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/7132046\/7147342\/07147501.pdf?arnumber=7147501","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,11,28]],"date-time":"2025-11-28T18:41:24Z","timestamp":1764355284000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/7147501\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2015,4]]},"references-count":5,"URL":"https:\/\/doi.org\/10.1109\/nems.2015.7147501","relation":{},"subject":[],"published":{"date-parts":[[2015,4]]}}}