{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,5]],"date-time":"2024-09-05T01:11:55Z","timestamp":1725498715467},"reference-count":11,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2016,4]]},"DOI":"10.1109\/nems.2016.7758285","type":"proceedings-article","created":{"date-parts":[[2016,12,19]],"date-time":"2016-12-19T21:10:20Z","timestamp":1482181820000},"page":"438-441","source":"Crossref","is-referenced-by-count":0,"title":["Theoretical, numerical and experimental study of residual stress effect on two microresonators for acoustic sensing"],"prefix":"10.1109","author":[{"given":"Weiguan","family":"Zhang","sequence":"first","affiliation":[]},{"given":"Wenshu","family":"Sui","sequence":"additional","affiliation":[]},{"given":"Yi-Kuen","family":"Lee","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"article-title":"CMOS MEMS: a platform technology for microsystems","year":"2006","author":"fang","key":"ref4"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2011.2174420"},{"journal-title":"Mechanical Vibrations","year":"2010","author":"rao","key":"ref10"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.2001.906522"},{"journal-title":"Theory of Plates and Shells","year":"1959","author":"timoshenko","key":"ref11"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1016\/j.proche.2009.07.214"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/3\/4\/020"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/84.285722"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/ICSENS.2004.1426330"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/ULTSYM.2008.0522"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2007.909234"}],"event":{"name":"2016 IEEE 11th Annual International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2016,4,17]]},"location":"Sendai, Japan","end":{"date-parts":[[2016,4,20]]}},"container-title":["2016 IEEE 11th Annual International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/7750493\/7758182\/07758285.pdf?arnumber=7758285","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2016,12,20]],"date-time":"2016-12-20T03:43:58Z","timestamp":1482205438000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/7758285\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2016,4]]},"references-count":11,"URL":"https:\/\/doi.org\/10.1109\/nems.2016.7758285","relation":{},"subject":[],"published":{"date-parts":[[2016,4]]}}}