{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,5]],"date-time":"2024-09-05T17:52:27Z","timestamp":1725558747810},"reference-count":8,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2016,4]]},"DOI":"10.1109\/nems.2016.7758311","type":"proceedings-article","created":{"date-parts":[[2016,12,19]],"date-time":"2016-12-19T16:10:20Z","timestamp":1482163820000},"page":"549-552","source":"Crossref","is-referenced-by-count":0,"title":["Combination of LPCVD and PECVD SiC in fabricating evanescent waveguides"],"prefix":"10.1109","author":[{"given":"Yu","family":"Xin","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Gregory","family":"Pandraud","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Lukasz S.","family":"Pakula","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Bruno","family":"Morana","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Paddy J.","family":"French","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2007.04.030"},{"key":"ref3","first-page":"2506","article-title":"TiO2 freestanding thin film as evanescent waveguide sensor for biomedical application","author":"purniawan","year":"2011","journal-title":"BT?2011 16th International Solid-State"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/NEMS.2011.6017316"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(97)01730-5"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1016\/j.matchemphys.2013.02.013"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(99)00335-0"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.3390\/s90705783"},{"key":"ref1","first-page":"152","article-title":"Directional switching in planar waveguides effected by adsorption-desorption processes","author":"lukosz","year":"0"}],"event":{"name":"2016 IEEE 11th Annual International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2016,4,17]]},"location":"Sendai, Japan","end":{"date-parts":[[2016,4,20]]}},"container-title":["2016 IEEE 11th Annual International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/7750493\/7758182\/07758311.pdf?arnumber=7758311","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2016,12,19]],"date-time":"2016-12-19T22:43:36Z","timestamp":1482187416000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/7758311\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2016,4]]},"references-count":8,"URL":"https:\/\/doi.org\/10.1109\/nems.2016.7758311","relation":{},"subject":[],"published":{"date-parts":[[2016,4]]}}}