{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,29]],"date-time":"2026-04-29T18:26:58Z","timestamp":1777487218967,"version":"3.51.4"},"reference-count":6,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2017,4]]},"DOI":"10.1109\/nems.2017.8017086","type":"proceedings-article","created":{"date-parts":[[2017,8,29]],"date-time":"2017-08-29T19:38:24Z","timestamp":1504035504000},"page":"566-569","source":"Crossref","is-referenced-by-count":4,"title":["Anodic bonding using Gorilla Glasses"],"prefix":"10.1109","author":[{"given":"ChingHung","family":"Hsu","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Gui","family":"Chen","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yen-Heng","family":"Lin","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Mark Ming-Cheng","family":"Cheng","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref4","year":"0"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/5\/2\/010"},{"key":"ref6","first-page":"175","volume":"108","author":"christine","year":"2016","journal-title":"International Biodeterioration & Biodegradation"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1149\/1.2085374"},{"key":"ref2","first-page":"103","volume":"86","author":"thomas","year":"2000","journal-title":"Sensors and Actuators"},{"key":"ref1","first-page":"10","volume":"25","author":"he","year":"2015","journal-title":"J Micromech Microeng"}],"event":{"name":"2017 IEEE 12th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","location":"Los Angeles, CA, USA","start":{"date-parts":[[2017,4,9]]},"end":{"date-parts":[[2017,4,12]]}},"container-title":["2017 IEEE 12th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8012169\/8016956\/08017086.pdf?arnumber=8017086","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,9,11]],"date-time":"2017-09-11T23:13:35Z","timestamp":1505171615000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/8017086\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2017,4]]},"references-count":6,"URL":"https:\/\/doi.org\/10.1109\/nems.2017.8017086","relation":{},"subject":[],"published":{"date-parts":[[2017,4]]}}}