{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,30]],"date-time":"2024-10-30T10:53:04Z","timestamp":1730285584065,"version":"3.28.0"},"reference-count":12,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2017,4]]},"DOI":"10.1109\/nems.2017.8017145","type":"proceedings-article","created":{"date-parts":[[2017,8,29]],"date-time":"2017-08-29T15:38:24Z","timestamp":1504021104000},"page":"840-843","source":"Crossref","is-referenced-by-count":1,"title":["Microfabrication of hybrid structure composed of rigid silicon and flexible polyimide membranes"],"prefix":"10.1109","author":[{"given":"Sunao","family":"Murakami","sequence":"first","affiliation":[]},{"given":"Daisuke","family":"Ishihara","sequence":"additional","affiliation":[]},{"given":"Masateru","family":"Araki","sequence":"additional","affiliation":[]},{"given":"Tomoyoshi","family":"Horie","sequence":"additional","affiliation":[]},{"given":"Naoto","family":"Ohira","sequence":"additional","affiliation":[]},{"given":"Takahiro","family":"Ito","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/5.704259"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/TRANSDUCERS.2011.5969670"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1242\/jeb.030684"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1038\/micronano.2016.43"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1088\/1748-3182\/9\/4\/046009"},{"key":"ref5","first-page":"1202","article-title":"A walking silicon micro-robot","author":"ebefors","year":"1999","journal-title":"Proc 10th International Conference on Solid-State Sensors and Actuators"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1088\/1748-3190\/12\/1\/016008"},{"key":"ref8","first-page":"1764","article-title":"Fluid-structure interaction design of micro flexible wing mimicking insect flapping flight","author":"ishihara","year":"2016","journal-title":"Proc of the 12th World Computer Congress"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2011.11.006"},{"key":"ref2","first-page":"429","article-title":"Hierarchal decomposition for the structure-fluid-electrostatic interaction in a microelectromechanical system","volume":"108","author":"ishihara","year":"2015","journal-title":"Computer Modeling in Engineering and Sciences"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1242\/jeb.020404"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1049\/mnl.2011.0097"}],"event":{"name":"2017 IEEE 12th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2017,4,9]]},"location":"Los Angeles, CA, USA","end":{"date-parts":[[2017,4,12]]}},"container-title":["2017 IEEE 12th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8012169\/8016956\/08017145.pdf?arnumber=8017145","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,9,11]],"date-time":"2017-09-11T19:11:12Z","timestamp":1505157072000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/8017145\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2017,4]]},"references-count":12,"URL":"https:\/\/doi.org\/10.1109\/nems.2017.8017145","relation":{},"subject":[],"published":{"date-parts":[[2017,4]]}}}