{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,22]],"date-time":"2026-04-22T17:41:25Z","timestamp":1776879685170,"version":"3.51.2"},"reference-count":10,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2018,4]]},"DOI":"10.1109\/nems.2018.8556953","type":"proceedings-article","created":{"date-parts":[[2018,12,13]],"date-time":"2018-12-13T01:00:02Z","timestamp":1544662802000},"page":"397-400","source":"Crossref","is-referenced-by-count":2,"title":["A High-Selectivity HNA Etching System for Bulk Micromachined Deep Holes with High Roundness"],"prefix":"10.1109","author":[{"given":"Taotao","family":"Guan","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Fang","family":"Yang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wei","family":"Wang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Peng","family":"Liu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zexin","family":"Fan","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Leijian","family":"Cheng","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zikun","family":"Chen","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Runze","family":"Yu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Qiancheng","family":"Zhao","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wei","family":"Wang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Dacheng","family":"Zhang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref4","first-page":"1","article-title":"Design optimisation of high sensitivity MEMS piezoresistive intracranial pressure sensor using Taguchi approach","author":"mazita","year":"2018","journal-title":"Microsyst Technol"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/TRANSDUCERS.2015.7181113"},{"key":"ref10","first-page":"168","volume":"59","author":"sorenson","year":"2012","journal-title":"MEMS"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevLett.65.504"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2013.2267613"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1016\/j.mssp.2013.05.017"},{"key":"ref7","first-page":"203","author":"abd aziz","year":"2008","journal-title":"21st Int Conference on Software Engineering (ICSE)"},{"key":"ref2","doi-asserted-by":"crossref","first-page":"3301","DOI":"10.1007\/s00542-016-3171-1","article-title":"Calibration and data processing technology of gyroscope in dual axis rotational inertial navigation system","volume":"23","author":"chen","year":"2017","journal-title":"Microsyst Technol"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2009.10.019"},{"key":"ref1","first-page":"180","article-title":"Personal inertial navigation system employing MEMS wearable ground reaction sensor array and interface ASIC achieving a position accuracy of 5.5 m over 3 km walking distance without GPS","author":"guo","year":"2018","journal-title":"IEEE Int Solid-State Circuits Conf (ISSCC) Dig Tech Papers"}],"event":{"name":"2018 IEEE 13th Annual International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","location":"Singapore","start":{"date-parts":[[2018,4,22]]},"end":{"date-parts":[[2018,4,26]]}},"container-title":["2018 IEEE 13th Annual International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8540837\/8556858\/08556953.pdf?arnumber=8556953","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,11,11]],"date-time":"2021-11-11T00:13:01Z","timestamp":1636589581000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/8556953\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2018,4]]},"references-count":10,"URL":"https:\/\/doi.org\/10.1109\/nems.2018.8556953","relation":{},"subject":[],"published":{"date-parts":[[2018,4]]}}}