{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,30]],"date-time":"2024-10-30T10:41:59Z","timestamp":1730284919190,"version":"3.28.0"},"reference-count":13,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2018,4]]},"DOI":"10.1109\/nems.2018.8556966","type":"proceedings-article","created":{"date-parts":[[2018,12,13]],"date-time":"2018-12-13T01:00:02Z","timestamp":1544662802000},"page":"603-606","source":"Crossref","is-referenced-by-count":2,"title":["High Performance Humidity Sensor by Using Silicon Nanowire Array"],"prefix":"10.1109","author":[{"given":"Xun","family":"Yang","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yuelin","family":"Wang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Tie","family":"Li","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2015.10.020"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1021\/ja8032907"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1016\/j.physe.2008.10.016"},{"key":"ref13","first-page":"1","article-title":"Wafer-level and highly controllable fabricated silicon nanowire transistor arrays on (111) silicon-on-insulator (SOI) wafers for highly sensitive detection in liquid and gaseous environments","author":"yang","year":"2007","journal-title":"Nano Research"},{"key":"ref4","doi-asserted-by":"crossref","first-page":"885","DOI":"10.1038\/nature06181","article-title":"Coaxial silicon nanowires as solar cells and nanoelectronic power sources","volume":"449","author":"tian","year":"2007","journal-title":"Nature"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1021\/nl0345062"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1007\/s12274-011-0162-5"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1063\/1.2821113"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1021\/nl901734e"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1021\/ja205703c"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1002\/1521-4095(200108)13:16<1238::AID-ADMA1238>3.0.CO;2-3"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1016\/j.snb.2012.09.062"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1088\/0957-4484\/19\/25\/255703"}],"event":{"name":"2018 IEEE 13th Annual International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2018,4,22]]},"location":"Singapore","end":{"date-parts":[[2018,4,26]]}},"container-title":["2018 IEEE 13th Annual International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8540837\/8556858\/08556966.pdf?arnumber=8556966","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,11,11]],"date-time":"2021-11-11T00:12:24Z","timestamp":1636589544000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/8556966\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2018,4]]},"references-count":13,"URL":"https:\/\/doi.org\/10.1109\/nems.2018.8556966","relation":{},"subject":[],"published":{"date-parts":[[2018,4]]}}}