{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,13]],"date-time":"2025-10-13T20:01:01Z","timestamp":1760385661247,"version":"3.28.0"},"reference-count":17,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2018,4]]},"DOI":"10.1109\/nems.2018.8557003","type":"proceedings-article","created":{"date-parts":[[2018,12,12]],"date-time":"2018-12-12T20:00:02Z","timestamp":1544644802000},"page":"304-307","source":"Crossref","is-referenced-by-count":3,"title":["A Study on High Resolution Batch-Mode Micro-Utralsonic-Machining with Constant Feed Force of Sapphire for MEMS Application"],"prefix":"10.1109","author":[{"given":"Yanming","family":"Xia","sequence":"first","affiliation":[]},{"given":"Tao","family":"Wang","sequence":"additional","affiliation":[]},{"given":"Lu","family":"Song","sequence":"additional","affiliation":[]},{"given":"Xuanyanz","family":"Li","sequence":"additional","affiliation":[]},{"given":"Shenglin","family":"Ma","sequence":"additional","affiliation":[]},{"given":"Rongfeng","family":"Luo","sequence":"additional","affiliation":[]},{"given":"Jing","family":"Chen","sequence":"additional","affiliation":[]},{"given":"Wei","family":"Wang","sequence":"additional","affiliation":[]},{"given":"Yufeng","family":"Jin","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"doi-asserted-by":"publisher","key":"ref10","DOI":"10.1149\/1.3616019"},{"doi-asserted-by":"publisher","key":"ref11","DOI":"10.1109\/LPT.2006.874737"},{"doi-asserted-by":"publisher","key":"ref12","DOI":"10.1109\/LPT.2006.877565"},{"doi-asserted-by":"publisher","key":"ref13","DOI":"10.1016\/S0007-8506(07)60398-9"},{"key":"ref14","first-page":"1","article-title":"Fabrication of serpentine micro-channels on glass by ultrasonic machining using developed micro-tool by wire-cut electric discharge machining","author":"das","year":"2017","journal-title":"The International Journal of Advanced Manufacturing Technology"},{"doi-asserted-by":"publisher","key":"ref15","DOI":"10.1109\/MEMSYS.2011.5734358"},{"doi-asserted-by":"publisher","key":"ref16","DOI":"10.1109\/MEMSYS.2010.5442495"},{"key":"ref17","doi-asserted-by":"crossref","first-page":"605","DOI":"10.1109\/JMEMS.2006.876667","article-title":"A micromachining process for die-scale pattern transfer in ceramics and its application to bulk piezoelectric actuators","volume":"15","author":"tao","year":"2006","journal-title":"Journal of Microelectromechanical Systems"},{"doi-asserted-by":"publisher","key":"ref4","DOI":"10.2514\/6.2017-0478"},{"doi-asserted-by":"publisher","key":"ref3","DOI":"10.2514\/6.2016-2016"},{"key":"ref6","first-page":"1","article-title":"High reflectance patterned substrate designed for optical devices","author":"lan","year":"2015","journal-title":"Optical MEMS and Nanophotonics (OMN) 2015 International Conference on"},{"doi-asserted-by":"publisher","key":"ref5","DOI":"10.1109\/MEMSYS.2012.6170085"},{"doi-asserted-by":"publisher","key":"ref8","DOI":"10.1149\/2.095206jes"},{"doi-asserted-by":"publisher","key":"ref7","DOI":"10.1109\/LPT.2017.2700854"},{"doi-asserted-by":"publisher","key":"ref2","DOI":"10.1109\/TRANSDUCERS.2015.7181168"},{"doi-asserted-by":"publisher","key":"ref1","DOI":"10.1088\/0960-1317\/25\/1\/015016"},{"key":"ref9","first-page":"25","article-title":"Double-sided pattern design on patterned sapphire substrate of GaN-based LEDs","author":"yu","year":"2014","journal-title":"Numerical Simulation of Optoelectronic Devices (NUSOD)"}],"event":{"name":"2018 IEEE 13th Annual International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2018,4,22]]},"location":"Singapore","end":{"date-parts":[[2018,4,26]]}},"container-title":["2018 IEEE 13th Annual International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8540837\/8556858\/08557003.pdf?arnumber=8557003","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,11,10]],"date-time":"2021-11-10T19:12:52Z","timestamp":1636571572000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/8557003\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2018,4]]},"references-count":17,"URL":"https:\/\/doi.org\/10.1109\/nems.2018.8557003","relation":{},"subject":[],"published":{"date-parts":[[2018,4]]}}}