{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,29]],"date-time":"2025-10-29T03:47:20Z","timestamp":1761709640191,"version":"3.28.0"},"reference-count":7,"publisher":"IEEE","license":[{"start":{"date-parts":[[2019,4,1]],"date-time":"2019-04-01T00:00:00Z","timestamp":1554076800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2019,4,1]],"date-time":"2019-04-01T00:00:00Z","timestamp":1554076800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2019,4,1]],"date-time":"2019-04-01T00:00:00Z","timestamp":1554076800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2019,4]]},"DOI":"10.1109\/nems.2019.8915594","type":"proceedings-article","created":{"date-parts":[[2019,11,29]],"date-time":"2019-11-29T09:44:41Z","timestamp":1575020681000},"page":"494-497","source":"Crossref","is-referenced-by-count":4,"title":["Reducing the Effect of Parasitic Capacitance on the Micro-capacitive Humidity Sensor"],"prefix":"10.1109","author":[{"given":"Jihang","family":"Liu","sequence":"first","affiliation":[]},{"given":"Lidong","family":"Du","sequence":"additional","affiliation":[]},{"given":"Yichen","family":"Pan","sequence":"additional","affiliation":[]},{"given":"Yusi","family":"Zhu","sequence":"additional","affiliation":[]},{"given":"Zhen","family":"Fang","sequence":"additional","affiliation":[]},{"family":"Zhanzhao","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2012.10.018"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.3390\/s18051516"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1016\/j.snb.2015.03.024"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2009.2036584"},{"key":"ref7","doi-asserted-by":"crossref","first-page":"34502","DOI":"10.1117\/1.JMM.16.3.034502","article-title":"Numerical study on response time of a parallel plate capacitive polyimide humidity sensor based on microhole upper electrode","volume":"16","author":"he","year":"2017","journal-title":"J Micro\/Nanolithography MEMS MOEMS"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1016\/j.snb.2006.05.042"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/16.830983"}],"event":{"name":"2019 IEEE 14th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2019,4,11]]},"location":"Bangkok, Thailand","end":{"date-parts":[[2019,4,14]]}},"container-title":["2019 IEEE 14th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8907345\/8915582\/08915594.pdf?arnumber=8915594","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,7,18]],"date-time":"2022-07-18T10:52:34Z","timestamp":1658141554000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/8915594\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019,4]]},"references-count":7,"URL":"https:\/\/doi.org\/10.1109\/nems.2019.8915594","relation":{},"subject":[],"published":{"date-parts":[[2019,4]]}}}