{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,22]],"date-time":"2025-10-22T10:41:14Z","timestamp":1761129674938},"reference-count":15,"publisher":"IEEE","license":[{"start":{"date-parts":[[2019,4,1]],"date-time":"2019-04-01T00:00:00Z","timestamp":1554076800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2019,4,1]],"date-time":"2019-04-01T00:00:00Z","timestamp":1554076800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2019,4,1]],"date-time":"2019-04-01T00:00:00Z","timestamp":1554076800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2019,4]]},"DOI":"10.1109\/nems.2019.8915602","type":"proceedings-article","created":{"date-parts":[[2019,11,29]],"date-time":"2019-11-29T14:44:41Z","timestamp":1575038681000},"source":"Crossref","is-referenced-by-count":5,"title":["Fabrication Process and Performance Analysis of AlN based Piezoelectric Micromachined Ultrasonic Transducer with a Suspended Structure"],"prefix":"10.1109","author":[{"given":"Li","family":"Wang","sequence":"first","affiliation":[]},{"given":"Yihsiang","family":"Chiu","sequence":"additional","affiliation":[]},{"given":"Dan","family":"Gong","sequence":"additional","affiliation":[]},{"given":"Shenglin","family":"Ma","sequence":"additional","affiliation":[]},{"given":"Yang","family":"Yang","sequence":"additional","affiliation":[]},{"given":"Heng","family":"Li","sequence":"additional","affiliation":[]},{"given":"Hungping","family":"Lee","sequence":"additional","affiliation":[]},{"given":"Huguang","family":"Liu","sequence":"additional","affiliation":[]},{"given":"Yufeng","family":"Jin","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1088\/1361-6439\/aae8da"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.7567\/JJAP.54.102001"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2014.2387154"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/TUFFC.2003.1251142"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/ICSENS.2015.7370564"},{"key":"ref15","author":"kinsler","year":"1999","journal-title":"Fundamentals of Acoustics"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2016.2577038"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/ULTSYM.2009.5441602"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1049\/mnl:20080052"},{"key":"ref5","first-page":"234","article-title":"Acoustic transducers built on edgereleased MEMS structures","author":"chen","year":"2010","journal-title":"Solid-State Sensor and Actuator Workshop"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/NEMS.2013.6559745"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/NEMS.2011.6017360"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/JSSC.2016.2604291"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/TRANSDUCERS.2017.7994211"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/IITC.2006.1648629"}],"event":{"name":"2019 IEEE 14th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","location":"Bangkok, Thailand","start":{"date-parts":[[2019,4,11]]},"end":{"date-parts":[[2019,4,14]]}},"container-title":["2019 IEEE 14th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8907345\/8915582\/08915602.pdf?arnumber=8915602","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,7,18]],"date-time":"2022-07-18T14:49:29Z","timestamp":1658155769000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/8915602\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019,4]]},"references-count":15,"URL":"https:\/\/doi.org\/10.1109\/nems.2019.8915602","relation":{},"subject":[],"published":{"date-parts":[[2019,4]]}}}