{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,6]],"date-time":"2024-09-06T03:51:20Z","timestamp":1725594680354},"reference-count":6,"publisher":"IEEE","license":[{"start":{"date-parts":[[2019,4,1]],"date-time":"2019-04-01T00:00:00Z","timestamp":1554076800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2019,4,1]],"date-time":"2019-04-01T00:00:00Z","timestamp":1554076800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2019,4,1]],"date-time":"2019-04-01T00:00:00Z","timestamp":1554076800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2019,4]]},"DOI":"10.1109\/nems.2019.8915627","type":"proceedings-article","created":{"date-parts":[[2019,11,29]],"date-time":"2019-11-29T14:44:41Z","timestamp":1575038681000},"page":"418-422","source":"Crossref","is-referenced-by-count":0,"title":["Anisotropic Pyrochemical Etching of PTFE by Synchrotron Radiation"],"prefix":"10.1109","author":[{"given":"Masaya","family":"Takeuchi","sequence":"first","affiliation":[]},{"given":"Akinobu","family":"Yamaguchi","sequence":"additional","affiliation":[]},{"given":"Yuichi","family":"Utsumi","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1063\/1.115533"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.34.L1675"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1063\/1.4941668"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.47.337"},{"key":"ref2","first-page":"86","article-title":"Micromachining characteristics of the polytetrafluoroethylene (PTFE) Materials","author":"kim","year":"0","journal-title":"9 th International Workshop on Microfactories (IWMF2014)"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1063\/1.100831"}],"event":{"name":"2019 IEEE 14th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2019,4,11]]},"location":"Bangkok, Thailand","end":{"date-parts":[[2019,4,14]]}},"container-title":["2019 IEEE 14th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8907345\/8915582\/08915627.pdf?arnumber=8915627","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,7,18]],"date-time":"2022-07-18T14:49:28Z","timestamp":1658155768000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/8915627\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019,4]]},"references-count":6,"URL":"https:\/\/doi.org\/10.1109\/nems.2019.8915627","relation":{},"subject":[],"published":{"date-parts":[[2019,4]]}}}