{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,19]],"date-time":"2026-01-19T10:57:41Z","timestamp":1768820261361,"version":"3.49.0"},"reference-count":13,"publisher":"IEEE","license":[{"start":{"date-parts":[[2019,4,1]],"date-time":"2019-04-01T00:00:00Z","timestamp":1554076800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2019,4,1]],"date-time":"2019-04-01T00:00:00Z","timestamp":1554076800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2019,4,1]],"date-time":"2019-04-01T00:00:00Z","timestamp":1554076800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2019,4]]},"DOI":"10.1109\/nems.2019.8915652","type":"proceedings-article","created":{"date-parts":[[2019,11,29]],"date-time":"2019-11-29T14:44:41Z","timestamp":1575038681000},"page":"105-109","source":"Crossref","is-referenced-by-count":4,"title":["Development of a 4H-SiC Piezoresistive Pressure Sensor for High Temperature Applications"],"prefix":"10.1109","author":[{"given":"Xudong","family":"Fang","sequence":"first","affiliation":[]},{"given":"Chen","family":"Wu","sequence":"additional","affiliation":[]},{"given":"Xin","family":"Guo","sequence":"additional","affiliation":[]},{"given":"Libo","family":"Zhao","sequence":"additional","affiliation":[]},{"given":"Yulong","family":"Zhao","sequence":"additional","affiliation":[]},{"given":"Zhuangde","family":"Jiang","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2006.874447"},{"key":"ref11","author":"okojie","year":"2015","journal-title":"4H-SiC Piezoresistive Pressure Sensors at 800 °C with Observed Sensitivity Recovery"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2015.2470132"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/TRANSDUCERS.2011.5969561"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.2514\/6.2001-4652"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/HITEC.1998.676799"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/ICSENS.2007.4388508"},{"key":"ref5","article-title":"\/spl alpha\/(6H)-SiC pressure sensors for high temperature applications","author":"okojie","year":"1996","journal-title":"Micro Electro Mechanical Systems 1996 MEMS’96 Proceedings An Investigation of Micro Structures Sensors Actuators Machines and Systems IEEE The Ninth Annual International Workshop on"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/15\/12\/005"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2004.830301"},{"key":"ref2","article-title":"Operation of\/spl alpha\/(6H)-SiC pressure sensor at 500\/spl deg\/C","author":"okojie","year":"1997","journal-title":"Solid State Sensors and Actuators 1997 TRANSDUCERS '97 Chicago 1997 International Conference on"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(98)00009-0"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/LPT.2007.893752"}],"event":{"name":"2019 IEEE 14th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","location":"Bangkok, Thailand","start":{"date-parts":[[2019,4,11]]},"end":{"date-parts":[[2019,4,14]]}},"container-title":["2019 IEEE 14th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8907345\/8915582\/08915652.pdf?arnumber=8915652","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,7,18]],"date-time":"2022-07-18T14:49:29Z","timestamp":1658155769000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/8915652\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019,4]]},"references-count":13,"URL":"https:\/\/doi.org\/10.1109\/nems.2019.8915652","relation":{},"subject":[],"published":{"date-parts":[[2019,4]]}}}