{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,30]],"date-time":"2024-10-30T10:43:04Z","timestamp":1730284984431,"version":"3.28.0"},"reference-count":10,"publisher":"IEEE","license":[{"start":{"date-parts":[[2020,9,27]],"date-time":"2020-09-27T00:00:00Z","timestamp":1601164800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2020,9,27]],"date-time":"2020-09-27T00:00:00Z","timestamp":1601164800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2020,9,27]],"date-time":"2020-09-27T00:00:00Z","timestamp":1601164800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/100006190","name":"Research and Development","doi-asserted-by":"publisher","id":[{"id":"10.13039\/100006190","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012226","name":"Fundamental Research Funds for the Central Universities","doi-asserted-by":"publisher","id":[{"id":"10.13039\/501100012226","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2020,9,27]]},"DOI":"10.1109\/nems50311.2020.9265584","type":"proceedings-article","created":{"date-parts":[[2020,11,27]],"date-time":"2020-11-27T20:41:57Z","timestamp":1606509717000},"page":"167-170","source":"Crossref","is-referenced-by-count":0,"title":["A Novel Peninsula-island Structure for Sensing Ultra-low Pressure Based on Dry-wet Combination Etching Process"],"prefix":"10.1109","author":[{"given":"Mimi","family":"Huang","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Libo","family":"Zhao","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Tingzhong","family":"Xu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chen","family":"Jia","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ping","family":"Yang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhikang","family":"Li","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hongyan","family":"Wang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yongshun","family":"Wu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhuangde","family":"Jiang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1080\/13645700310023069"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1088\/0957-0233\/7\/9\/002"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1088\/0022-3727\/49\/7\/075110"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1016\/0250-6874(84)80021-9"},{"journal-title":"Theory of Plates and Shells","year":"1959","author":"stephen","key":"ref5"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2014.05.031"},{"key":"ref7","doi-asserted-by":"crossref","first-page":"1360","DOI":"10.1109\/T-ED.1987.23092","article-title":"nonlinear analysis of a cmos integrated silicon pressure sensor","volume":"34","author":"suzuki","year":"1987","journal-title":"IEEE Transactions on Electron Devices"},{"journal-title":"Foundations of MEMS","year":"2006","author":"liu","key":"ref2"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2016.04.027"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1088\/0964-1726\/6\/5\/004"}],"event":{"name":"2020 IEEE 15th International Conference on Nano\/Micro Engineered and Molecular System (NEMS)","start":{"date-parts":[[2020,9,27]]},"location":"San Diego, CA, USA","end":{"date-parts":[[2020,9,30]]}},"container-title":["2020 IEEE 15th International Conference on Nano\/Micro Engineered and Molecular System (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/9265537\/9265518\/09265584.pdf?arnumber=9265584","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,6,28]],"date-time":"2022-06-28T21:52:23Z","timestamp":1656453143000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9265584\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2020,9,27]]},"references-count":10,"URL":"https:\/\/doi.org\/10.1109\/nems50311.2020.9265584","relation":{},"subject":[],"published":{"date-parts":[[2020,9,27]]}}}