{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,30]],"date-time":"2024-10-30T10:43:17Z","timestamp":1730284997151,"version":"3.28.0"},"reference-count":15,"publisher":"IEEE","license":[{"start":{"date-parts":[[2020,9,27]],"date-time":"2020-09-27T00:00:00Z","timestamp":1601164800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2020,9,27]],"date-time":"2020-09-27T00:00:00Z","timestamp":1601164800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2020,9,27]],"date-time":"2020-09-27T00:00:00Z","timestamp":1601164800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/100006190","name":"Research and Development","doi-asserted-by":"publisher","id":[{"id":"10.13039\/100006190","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100002367","name":"Chinese Academy of Sciences","doi-asserted-by":"publisher","id":[{"id":"10.13039\/501100002367","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2020,9,27]]},"DOI":"10.1109\/nems50311.2020.9265612","type":"proceedings-article","created":{"date-parts":[[2020,11,27]],"date-time":"2020-11-27T15:41:57Z","timestamp":1606491717000},"page":"63-66","source":"Crossref","is-referenced-by-count":0,"title":["A MEMS Based Electrochemical Rotational Vibration Sensor"],"prefix":"10.1109","author":[{"given":"Bowen","family":"Liu","sequence":"first","affiliation":[]},{"given":"Junbo","family":"Wang","sequence":"additional","affiliation":[]},{"given":"Deyong","family":"Chen","sequence":"additional","affiliation":[]},{"given":"Jian","family":"Chen","sequence":"additional","affiliation":[]},{"given":"Chao","family":"Xu","sequence":"additional","affiliation":[]},{"given":"Tian","family":"Liang","sequence":"additional","affiliation":[]},{"given":"Wenjie","family":"Qi","sequence":"additional","affiliation":[]},{"given":"Xu","family":"She","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.4028\/www.scientific.net\/KEM.503.75"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2013.2292833"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1149\/1.2428192"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1023\/A:1023366123837"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1007\/s11175-005-0148-2"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1023\/B:RUEL.0000027625.71991.5e"},{"journal-title":"High resolution miniature MET sensors for healthcare and sport applications[C]","year":"2018","author":"zaitsev","key":"ref4"},{"article-title":"Small, Low-Power, Low-Cost Sensors for Personal Navigation and Stabilization Systems","year":"0","author":"kozlov","key":"ref3"},{"key":"ref6","article-title":"Electrochemical transducer and a method for fabricating the same","author":"abramovich","year":"2003","journal-title":"U S Patent"},{"key":"ref5","doi-asserted-by":"crossref","first-page":"29378","DOI":"10.3390\/s151129378","article-title":"Molecular Electronic Angular Motion Transducer Broad Band Self-Noise","volume":"15","author":"dmitry","year":"2015","journal-title":"SENSORS"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2013.2292833"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1023\/B:RUEL.0000023941.30845.03"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1155\/2016\/6148019"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.3390\/s18010245"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1063\/1.4806983"}],"event":{"name":"2020 IEEE 15th International Conference on Nano\/Micro Engineered and Molecular System (NEMS)","start":{"date-parts":[[2020,9,27]]},"location":"San Diego, CA, USA","end":{"date-parts":[[2020,9,30]]}},"container-title":["2020 IEEE 15th International Conference on Nano\/Micro Engineered and Molecular System (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/9265537\/9265518\/09265612.pdf?arnumber=9265612","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,6,28]],"date-time":"2022-06-28T17:51:49Z","timestamp":1656438709000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9265612\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2020,9,27]]},"references-count":15,"URL":"https:\/\/doi.org\/10.1109\/nems50311.2020.9265612","relation":{},"subject":[],"published":{"date-parts":[[2020,9,27]]}}}