{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,30]],"date-time":"2024-10-30T10:43:18Z","timestamp":1730284998676,"version":"3.28.0"},"reference-count":22,"publisher":"IEEE","license":[{"start":{"date-parts":[[2020,9,27]],"date-time":"2020-09-27T00:00:00Z","timestamp":1601164800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2020,9,27]],"date-time":"2020-09-27T00:00:00Z","timestamp":1601164800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2020,9,27]],"date-time":"2020-09-27T00:00:00Z","timestamp":1601164800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2020,9,27]]},"DOI":"10.1109\/nems50311.2020.9265626","type":"proceedings-article","created":{"date-parts":[[2020,11,27]],"date-time":"2020-11-27T15:41:57Z","timestamp":1606491717000},"page":"545-548","source":"Crossref","is-referenced-by-count":0,"title":["Scaling Effect Induced Rapid Quenching Improves the Performance of Microfabricated Electrostatic Micromirrors"],"prefix":"10.1109","author":[{"given":"Hao","family":"Ren","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Weimin","family":"Wang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Haichao","family":"Cao","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Sitao","family":"Fei","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yunping","family":"Niu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhihao","family":"Li","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","first-page":"674","volume":"4","author":"geng","year":"2017","journal-title":"Digital micromirror device-based two-photon microscopy for threedimensional and random-access imaging"},{"key":"ref11","first-page":"949","volume":"25","author":"pozzi","year":"2017","journal-title":"High speed wavefront sensorless aberration correction in digital micromirror based confocal microscopy"},{"key":"ref12","first-page":"45019","volume":"21","author":"ren","year":"2011","journal-title":"An out-of-plane electrostatic actuator based on the lever principle"},{"key":"ref13","first-page":"73401","volume":"49","author":"wang","year":"2010","journal-title":"Design and fabrication of a pyramid wavefront sensor"},{"key":"ref14","first-page":"21","volume":"5","author":"bifano","year":"2011","journal-title":"MEMS deformable mirrors"},{"doi-asserted-by":"publisher","key":"ref15","DOI":"10.1117\/12.687687"},{"key":"ref16","first-page":"323","article-title":"Actuated polysilicon micromirrors for raster-scanning displays","volume":"1","author":"kiang","year":"1997","journal-title":"Solid State Sensors and Actuators 1997 TRANSDUCERS '97 Chicago 1997 International Conference on"},{"key":"ref17","first-page":"34105","volume":"88","author":"legrand","year":"2006","journal-title":"Suppression of the pull-in instability for parallel-plate electrostatic actuators operated in dielectric liquids"},{"key":"ref18","first-page":"237","volume":"68","author":"hu","year":"2010","journal-title":"A MEMS micromirror driven by electrostatic force"},{"key":"ref19","first-page":"431","volume":"4","author":"ren","year":"2013","journal-title":"A bi-directional out-ofplane actuator by electrostatic force"},{"key":"ref4","first-page":"3391","volume":"55","author":"alahmad","year":"2008","journal-title":"Evaluation and analysis of a new solid-state rechargeable microscale lithium battery"},{"key":"ref3","first-page":"2584","volume":"36","author":"castellanos","year":"2003","journal-title":"Electrohydrodynamics and dielectrophoresis in microsystems scaling laws"},{"key":"ref6","first-page":"597","volume":"413","author":"venkatasubramanian","year":"2001","journal-title":"Thin-film thermoelectric devices with high room-temperature figures of merit"},{"doi-asserted-by":"publisher","key":"ref5","DOI":"10.1016\/j.bios.2014.05.037"},{"key":"ref8","first-page":"136","volume":"35","author":"mellette","year":"2016","journal-title":"A scalable partially configurable optical switch for data center networks"},{"key":"ref7","first-page":"772","volume":"253","author":"hirai","year":"1991","journal-title":"Modified phases of diamond formed under shock compression and rapid quenching"},{"doi-asserted-by":"publisher","key":"ref2","DOI":"10.1007\/s10404-012-0986-7"},{"doi-asserted-by":"publisher","key":"ref1","DOI":"10.1201\/9781482274004"},{"doi-asserted-by":"publisher","key":"ref9","DOI":"10.1109\/MEMSYS.2017.7863553"},{"key":"ref20","first-page":"35118","volume":"6","author":"wang","year":"2016","journal-title":"Electrostatic repulsive out-of-plane actuator using conductive substrate"},{"doi-asserted-by":"publisher","key":"ref22","DOI":"10.1016\/B978-0-12-386944-9.50023-6"},{"doi-asserted-by":"publisher","key":"ref21","DOI":"10.1002\/9781118671627"}],"event":{"name":"2020 IEEE 15th International Conference on Nano\/Micro Engineered and Molecular System (NEMS)","start":{"date-parts":[[2020,9,27]]},"location":"San Diego, CA, USA","end":{"date-parts":[[2020,9,30]]}},"container-title":["2020 IEEE 15th International Conference on Nano\/Micro Engineered and Molecular System (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/9265537\/9265518\/09265626.pdf?arnumber=9265626","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,6,28]],"date-time":"2022-06-28T17:55:35Z","timestamp":1656438935000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9265626\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2020,9,27]]},"references-count":22,"URL":"https:\/\/doi.org\/10.1109\/nems50311.2020.9265626","relation":{},"subject":[],"published":{"date-parts":[[2020,9,27]]}}}