{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,11,6]],"date-time":"2025-11-06T06:18:27Z","timestamp":1762409907923,"version":"3.37.3"},"reference-count":10,"publisher":"IEEE","license":[{"start":{"date-parts":[[2021,4,25]],"date-time":"2021-04-25T00:00:00Z","timestamp":1619308800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2021,4,25]],"date-time":"2021-04-25T00:00:00Z","timestamp":1619308800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2021,4,25]],"date-time":"2021-04-25T00:00:00Z","timestamp":1619308800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["51775446,51735011"],"award-info":[{"award-number":["51775446,51735011"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2021,4,25]]},"DOI":"10.1109\/nems51815.2021.9451296","type":"proceedings-article","created":{"date-parts":[[2021,6,21]],"date-time":"2021-06-21T21:11:44Z","timestamp":1624309904000},"page":"872-875","source":"Crossref","is-referenced-by-count":7,"title":["Through Glass Vias by Wet-etching Process in 49% HF Solution Using an AZ4620 Enhanced Cr\/Au Mask"],"prefix":"10.1109","author":[{"given":"Guanghui","family":"Ding","sequence":"first","affiliation":[]},{"given":"Binghe","family":"Ma","sequence":"additional","affiliation":[]},{"given":"Yuchao","family":"Yan","sequence":"additional","affiliation":[]},{"given":"Weizheng","family":"Yuan","sequence":"additional","affiliation":[]},{"given":"Jinjun","family":"Deng","sequence":"additional","affiliation":[]},{"given":"Jian","family":"Luo","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1166\/jnn.2012.6353"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.3390\/s18082682"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2006.06.044"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(03)00262-0"},{"key":"ref5","article-title":"Machining Processes of Pyrex Glass: A Technological Review","author":"pawar","year":"0","journal-title":"6th International & 27th All India Manufacturing Technology Design and Research Conference"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/24\/1\/015003"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(00)00390-3"},{"key":"ref2","first-page":"1907","article-title":"Micromachining of pyrex 7740 glass for micro-fluidic devices","author":"liu","year":"0","journal-title":"14th International Conference on Miniaturized Systems for Chemistry and Life Sciences Groningen The Netherlands"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-006-0116-0"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/8\/1\/006"}],"event":{"name":"2021 IEEE 16th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2021,4,25]]},"location":"Xiamen, China","end":{"date-parts":[[2021,4,29]]}},"container-title":["2021 IEEE 16th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/9451202\/9451223\/09451296.pdf?arnumber=9451296","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,5,10]],"date-time":"2022-05-10T15:42:29Z","timestamp":1652197349000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9451296\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,4,25]]},"references-count":10,"URL":"https:\/\/doi.org\/10.1109\/nems51815.2021.9451296","relation":{},"subject":[],"published":{"date-parts":[[2021,4,25]]}}}