{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,2,21]],"date-time":"2025-02-21T01:08:02Z","timestamp":1740100082857,"version":"3.37.3"},"reference-count":13,"publisher":"IEEE","license":[{"start":{"date-parts":[[2021,4,25]],"date-time":"2021-04-25T00:00:00Z","timestamp":1619308800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2021,4,25]],"date-time":"2021-04-25T00:00:00Z","timestamp":1619308800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2021,4,25]],"date-time":"2021-04-25T00:00:00Z","timestamp":1619308800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/501100012166","name":"National Key Research and Development Program of China","doi-asserted-by":"publisher","award":["2018YFF01010901,2016YFB0401903"],"award-info":[{"award-number":["2018YFF01010901,2016YFB0401903"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2021,4,25]]},"DOI":"10.1109\/nems51815.2021.9451299","type":"proceedings-article","created":{"date-parts":[[2021,6,21]],"date-time":"2021-06-21T21:11:44Z","timestamp":1624309904000},"page":"407-411","source":"Crossref","is-referenced-by-count":1,"title":["Temperature Compensation for MOEMS Micromirror with Piezoresistive Angle Sensor"],"prefix":"10.1109","author":[{"given":"Lei","family":"Qian","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Huijun","family":"Yu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jie","family":"Hu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wenjiang","family":"Shen","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2001.923584"},{"journal-title":"Micromachined Thermal Flow Sensors-A Review","year":"2012","author":"jonathan","key":"ref11"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2009.2026514"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2009.03.017"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.45.3789"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.3390\/s20226599"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1063\/1.353169"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/JPROC.2009.2013612"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRev.94.42"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.3390\/mi11070651"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1016\/j.proche.2009.07.326"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2010.01.011"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/T-ED.1982.20659"}],"event":{"name":"2021 IEEE 16th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2021,4,25]]},"location":"Xiamen, China","end":{"date-parts":[[2021,4,29]]}},"container-title":["2021 IEEE 16th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/9451202\/9451223\/09451299.pdf?arnumber=9451299","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,5,10]],"date-time":"2022-05-10T15:42:33Z","timestamp":1652197353000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9451299\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,4,25]]},"references-count":13,"URL":"https:\/\/doi.org\/10.1109\/nems51815.2021.9451299","relation":{},"subject":[],"published":{"date-parts":[[2021,4,25]]}}}