{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,5]],"date-time":"2024-09-05T22:42:42Z","timestamp":1725576162097},"reference-count":13,"publisher":"IEEE","license":[{"start":{"date-parts":[[2021,4,25]],"date-time":"2021-04-25T00:00:00Z","timestamp":1619308800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2021,4,25]],"date-time":"2021-04-25T00:00:00Z","timestamp":1619308800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2021,4,25]],"date-time":"2021-04-25T00:00:00Z","timestamp":1619308800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2021,4,25]]},"DOI":"10.1109\/nems51815.2021.9451413","type":"proceedings-article","created":{"date-parts":[[2021,6,21]],"date-time":"2021-06-21T21:11:44Z","timestamp":1624309904000},"page":"691-694","source":"Crossref","is-referenced-by-count":1,"title":["Linear stiffness tuning of MEMS triangular capacitors"],"prefix":"10.1109","author":[{"given":"Yiming","family":"Jin","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhipeng","family":"Ma","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yixuan","family":"Guo","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Tengfei","family":"Zhang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xudong","family":"Zheng","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhonghe","family":"Jin","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(98)00262-3"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-014-2243-3"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/84.679344"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2007.10.004"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/JSSC.2002.804345"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1016\/0924-4247(96)80095-1"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1088\/1361-6439\/abcedb"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/24\/12\/125003"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/MEMS46641.2020.9056177"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2009.2023985"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/ICSENS.2009.5398189"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1117\/12.810989"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1088\/1361-6439\/ab71e7"}],"event":{"name":"2021 IEEE 16th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2021,4,25]]},"location":"Xiamen, China","end":{"date-parts":[[2021,4,29]]}},"container-title":["2021 IEEE 16th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/9451202\/9451223\/09451413.pdf?arnumber=9451413","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,5,10]],"date-time":"2022-05-10T15:42:33Z","timestamp":1652197353000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9451413\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,4,25]]},"references-count":13,"URL":"https:\/\/doi.org\/10.1109\/nems51815.2021.9451413","relation":{},"subject":[],"published":{"date-parts":[[2021,4,25]]}}}