{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,6]],"date-time":"2026-02-06T05:26:05Z","timestamp":1770355565536,"version":"3.49.0"},"reference-count":22,"publisher":"IEEE","license":[{"start":{"date-parts":[[2021,4,25]],"date-time":"2021-04-25T00:00:00Z","timestamp":1619308800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2021,4,25]],"date-time":"2021-04-25T00:00:00Z","timestamp":1619308800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2021,4,25]],"date-time":"2021-04-25T00:00:00Z","timestamp":1619308800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["61874073"],"award-info":[{"award-number":["61874073"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/100007219","name":"Natural Science Foundation of Shanghai","doi-asserted-by":"publisher","award":["19ZR1477000"],"award-info":[{"award-number":["19ZR1477000"]}],"id":[{"id":"10.13039\/100007219","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2021,4,25]]},"DOI":"10.1109\/nems51815.2021.9451451","type":"proceedings-article","created":{"date-parts":[[2021,6,21]],"date-time":"2021-06-21T21:11:44Z","timestamp":1624309904000},"page":"1523-1526","source":"Crossref","is-referenced-by-count":8,"title":["Optimization of S1 Lamb wave resonators with A10.8Sc0.2N"],"prefix":"10.1109","author":[{"given":"Shuai","family":"Shao","sequence":"first","affiliation":[]},{"given":"Zhifang","family":"Luo","sequence":"additional","affiliation":[]},{"given":"Tao","family":"Wu","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref10","first-page":"1","article-title":"Characteristics of AIN Lamb wave resonators with various bottom electrode configurations","author":"lin","year":"2011","journal-title":"2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) Proceedings"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1063\/1.4979914"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2018.2867813"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1063\/1.5128961"},{"key":"ref14","first-page":"1","article-title":"A 3.5 GHz AIN S1lamb mode resonator","author":"gao","year":"2017","journal-title":"Ultrasonics Symposium (IUS) 2017 IEEE International"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1002\/adma.200802611"},{"key":"ref16","first-page":"1","article-title":"Investigation of 20% scandium-doped aluminum nitride films for MEMS laterally vibrating resonators","author":"colombo","year":"2017","journal-title":"Ultrasonics Symposium (IUS) 2017 IEEE International"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1109\/TUFFC.2018.2882073"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1063\/1.5040190"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1063\/1.5088892"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2011.2176921"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.3390\/s150408020"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2017.2757879"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1016\/j.mee.2021.111530"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/ULTSYM.2001.991846"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/ISSCC.2001.912569"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/ICSENS.2017.8234413"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.2019.8870764"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2006.889503"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1088\/0953-8984\/27\/24\/245901"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1109\/ULTSYM.2008.0377"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1063\/1.5094611"}],"event":{"name":"2021 IEEE 16th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","location":"Xiamen, China","start":{"date-parts":[[2021,4,25]]},"end":{"date-parts":[[2021,4,29]]}},"container-title":["2021 IEEE 16th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/9451202\/9451223\/09451451.pdf?arnumber=9451451","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,5,10]],"date-time":"2022-05-10T15:42:34Z","timestamp":1652197354000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9451451\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,4,25]]},"references-count":22,"URL":"https:\/\/doi.org\/10.1109\/nems51815.2021.9451451","relation":{},"subject":[],"published":{"date-parts":[[2021,4,25]]}}}