{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,2,21]],"date-time":"2025-02-21T01:08:07Z","timestamp":1740100087475,"version":"3.37.3"},"reference-count":15,"publisher":"IEEE","license":[{"start":{"date-parts":[[2021,4,25]],"date-time":"2021-04-25T00:00:00Z","timestamp":1619308800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2021,4,25]],"date-time":"2021-04-25T00:00:00Z","timestamp":1619308800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2021,4,25]],"date-time":"2021-04-25T00:00:00Z","timestamp":1619308800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/501100007085","name":"National University of Defense Technology","doi-asserted-by":"publisher","award":["51905538"],"award-info":[{"award-number":["51905538"]}],"id":[{"id":"10.13039\/501100007085","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2021,4,25]]},"DOI":"10.1109\/nems51815.2021.9451473","type":"proceedings-article","created":{"date-parts":[[2021,6,21]],"date-time":"2021-06-21T21:11:44Z","timestamp":1624309904000},"page":"1888-1892","source":"Crossref","is-referenced-by-count":0,"title":["Frequency Output, A multi-modes Vacuum Gauge with Highly Output linearity Based on Electrostatic Nonlinearity"],"prefix":"10.1109","author":[{"given":"Chengxiang","family":"Wang","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yunbin","family":"Kuang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yulie","family":"Wu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhanqiang","family":"Hou","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yongmeng","family":"Zhang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xuezhong","family":"Wu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Dingbang","family":"Xiao","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"year":"0","key":"ref10"},{"key":"ref11","article-title":"Analysis and Design of a Polygonal Obique Beam with Improved Robustness to Fabrication Imperfections[J]","volume":"9","author":"ou","year":"0","journal-title":"Micromachines"},{"key":"ref12","volume":"10","author":"ou","year":"0","journal-title":"A New Stress-released Structure to Improve the Temperature Stability of the Butterfly Vibratory Gyroscope[J]"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/16\/11\/012"},{"key":"ref14","first-page":"11 472","article-title":"Modal coupling effect in a novel nonlinear micromechanical resonator[J]","author":"l","year":"2020","journal-title":"Micromachines"},{"journal-title":"Analysis and Design Principles of MEMS Devices","year":"2005","author":"minghang","key":"ref15"},{"key":"ref4","doi-asserted-by":"crossref","first-page":"77","DOI":"10.1016\/j.sna.2014.01.036","article-title":"A high precision SOI MEMS-CMOS ±4g piezoresistive accelerometer[J]","volume":"210","author":"lal","year":"2014","journal-title":"Sensors and Actuators A"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2017.2679726"},{"year":"0","key":"ref6"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2007.04.033"},{"year":"0","key":"ref8"},{"year":"0","key":"ref7"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1038\/s41378-018-0035-0"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/PLANS.2014.6851408"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(98)80009-5"}],"event":{"name":"2021 IEEE 16th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2021,4,25]]},"location":"Xiamen, China","end":{"date-parts":[[2021,4,29]]}},"container-title":["2021 IEEE 16th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/9451202\/9451223\/09451473.pdf?arnumber=9451473","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,5,10]],"date-time":"2022-05-10T15:42:31Z","timestamp":1652197351000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9451473\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,4,25]]},"references-count":15,"URL":"https:\/\/doi.org\/10.1109\/nems51815.2021.9451473","relation":{},"subject":[],"published":{"date-parts":[[2021,4,25]]}}}