{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,30]],"date-time":"2024-10-30T10:44:32Z","timestamp":1730285072009,"version":"3.28.0"},"reference-count":6,"publisher":"IEEE","license":[{"start":{"date-parts":[[2021,4,25]],"date-time":"2021-04-25T00:00:00Z","timestamp":1619308800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2021,4,25]],"date-time":"2021-04-25T00:00:00Z","timestamp":1619308800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2021,4,25]],"date-time":"2021-04-25T00:00:00Z","timestamp":1619308800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2021,4,25]]},"DOI":"10.1109\/nems51815.2021.9451482","type":"proceedings-article","created":{"date-parts":[[2021,6,21]],"date-time":"2021-06-21T21:11:44Z","timestamp":1624309904000},"page":"1287-1290","source":"Crossref","is-referenced-by-count":0,"title":["Stochastic analysis of the elctrothermal microactuator with fabrication error"],"prefix":"10.1109","author":[{"given":"Haotian","family":"Liu","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hao","family":"Chen","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yun","family":"Cao","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Weirong","family":"Nie","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhanwen","family":"Xi","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Shenghong","family":"Lei","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.3390\/s17112561"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2004.05.001"},{"key":"ref6","first-page":"1205","article-title":"Electrothermal-driven gap adjustable MEMS comb structure: modeling and simulation of the equivalent circuit macromodel","volume":"20 6","author":"xuan","year":"2014","journal-title":"Microsystem Technologies"},{"key":"ref5","first-page":"1","author":"bouhadda","year":"2017","journal-title":"Dynamic characterization of an electrothermal actuator devoted to discrete MEMS positioning"},{"key":"ref2","article-title":"Influence of UV-LIGA fabrication error on performance of a MEMS ominidirectional inertial switch","author":"cao","year":"2017","journal-title":"Journal of Zhejiang University (Engineering Science)"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/26\/2\/025010"}],"event":{"name":"2021 IEEE 16th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2021,4,25]]},"location":"Xiamen, China","end":{"date-parts":[[2021,4,29]]}},"container-title":["2021 IEEE 16th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/9451202\/9451223\/09451482.pdf?arnumber=9451482","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,5,10]],"date-time":"2022-05-10T15:42:28Z","timestamp":1652197348000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9451482\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,4,25]]},"references-count":6,"URL":"https:\/\/doi.org\/10.1109\/nems51815.2021.9451482","relation":{},"subject":[],"published":{"date-parts":[[2021,4,25]]}}}