{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,2,21]],"date-time":"2025-02-21T01:08:04Z","timestamp":1740100084606,"version":"3.37.3"},"reference-count":10,"publisher":"IEEE","license":[{"start":{"date-parts":[[2021,4,25]],"date-time":"2021-04-25T00:00:00Z","timestamp":1619308800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2021,4,25]],"date-time":"2021-04-25T00:00:00Z","timestamp":1619308800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2021,4,25]],"date-time":"2021-04-25T00:00:00Z","timestamp":1619308800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/501100012166","name":"National Key R&D Program of China","doi-asserted-by":"publisher","award":["2018YFB2002302"],"award-info":[{"award-number":["2018YFB2002302"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["U1930206"],"award-info":[{"award-number":["U1930206"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100014219","name":"National Science Fund for Distinguished Young Scholars","doi-asserted-by":"publisher","award":["61825107"],"award-info":[{"award-number":["61825107"]}],"id":[{"id":"10.13039\/501100014219","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2021,4,25]]},"DOI":"10.1109\/nems51815.2021.9451486","type":"proceedings-article","created":{"date-parts":[[2021,6,21]],"date-time":"2021-06-21T21:11:44Z","timestamp":1624309904000},"page":"1465-1469","source":"Crossref","is-referenced-by-count":0,"title":["A Piezoresistive Pressure Microsensor Based on Simplified Fabrication Processes"],"prefix":"10.1109","author":[{"given":"Qinggang","family":"Meng","sequence":"first","affiliation":[]},{"given":"Yulan","family":"Lu","sequence":"additional","affiliation":[]},{"given":"Junbo","family":"Wang","sequence":"additional","affiliation":[]},{"given":"Deyong","family":"Chen","sequence":"additional","affiliation":[]},{"given":"Jian","family":"Chen","sequence":"additional","affiliation":[]},{"given":"Bo","family":"Xie","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/19.552150"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1080\/10426910500464446"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1007\/BF00752224"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1108\/SR-10-2018-0275"},{"journal-title":"Research on a Novel Structure MEMS Piezoresistive Pressure Sensor","year":"2018","author":"vang","key":"ref5"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1063\/1.1702605"},{"key":"ref7","first-page":"107","author":"yuan","year":"1986","journal-title":"Sensor Technology Handbook"},{"journal-title":"Sensing Technology and Application","year":"2010","author":"fan","key":"ref2"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.3390\/s20020337"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2018.07.006"}],"event":{"name":"2021 IEEE 16th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2021,4,25]]},"location":"Xiamen, China","end":{"date-parts":[[2021,4,29]]}},"container-title":["2021 IEEE 16th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/9451202\/9451223\/09451486.pdf?arnumber=9451486","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,5,10]],"date-time":"2022-05-10T15:42:31Z","timestamp":1652197351000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9451486\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,4,25]]},"references-count":10,"URL":"https:\/\/doi.org\/10.1109\/nems51815.2021.9451486","relation":{},"subject":[],"published":{"date-parts":[[2021,4,25]]}}}