{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,2,21]],"date-time":"2025-02-21T01:08:06Z","timestamp":1740100086888,"version":"3.37.3"},"reference-count":18,"publisher":"IEEE","license":[{"start":{"date-parts":[[2021,4,25]],"date-time":"2021-04-25T00:00:00Z","timestamp":1619308800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/ieeexplore.ieee.org\/Xplorehelp\/downloads\/license-information\/IEEE.html"},{"start":{"date-parts":[[2021,4,25]],"date-time":"2021-04-25T00:00:00Z","timestamp":1619308800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2021,4,25]],"date-time":"2021-04-25T00:00:00Z","timestamp":1619308800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/501100012282","name":"Beijing Innovation Center for Future Chips","doi-asserted-by":"publisher","award":["2019YFA0707002"],"award-info":[{"award-number":["2019YFA0707002"]}],"id":[{"id":"10.13039\/501100012282","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2021,4,25]]},"DOI":"10.1109\/nems51815.2021.9451489","type":"proceedings-article","created":{"date-parts":[[2021,6,21]],"date-time":"2021-06-21T21:11:44Z","timestamp":1624309904000},"page":"174-177","source":"Crossref","is-referenced-by-count":0,"title":["Fabrication of Nanoslits with <111> Etching TSWE Method"],"prefix":"10.1109","author":[{"given":"Hao","family":"Hong","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Li","family":"Ye","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ke","family":"Li","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Pasqualina M.","family":"Sarro","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Guoqi","family":"Zhang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zewen","family":"Liu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1021\/nn5049987"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1039\/c3nr02608f"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1021\/nl204273h"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1038\/srep14656"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1021\/nl102069z"},{"key":"ref15","doi-asserted-by":"crossref","first-page":"1561","DOI":"10.1021\/nl104359c","article-title":"A nanoparticles and DNA molecules in a femtoliter compartment: confined diffusion and narrow escape","volume":"11","author":"pedone","year":"2011","journal-title":"Nano Lett"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1002\/smll.200600268"},{"key":"ref17","article-title":"Fabrication of nanopores and nanoslits with feature sizes down to 5 nm by wet etching method","volume":"29","author":"chen","year":"2018","journal-title":"Nanotechnology"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1109\/MEMS46641.2020.9056122"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1016\/j.commatsci.2017.09.010"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1021\/acssensors.8b00165"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1016\/j.cej.2015.07.012"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1088\/0957-4484\/24\/50\/505303"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1038\/nnano.2007.344"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1038\/nnano.2013.22"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1038\/nnano.2016.267"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1021\/acs.nanolett.7b03987"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1038\/nbt.2503"}],"event":{"name":"2021 IEEE 16th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2021,4,25]]},"location":"Xiamen, China","end":{"date-parts":[[2021,4,29]]}},"container-title":["2021 IEEE 16th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/9451202\/9451223\/09451489.pdf?arnumber=9451489","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,5,10]],"date-time":"2022-05-10T15:42:31Z","timestamp":1652197351000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9451489\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,4,25]]},"references-count":18,"URL":"https:\/\/doi.org\/10.1109\/nems51815.2021.9451489","relation":{},"subject":[],"published":{"date-parts":[[2021,4,25]]}}}