{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,2,21]],"date-time":"2025-02-21T01:18:33Z","timestamp":1740100713591,"version":"3.37.3"},"reference-count":22,"publisher":"IEEE","license":[{"start":{"date-parts":[[2022,4,14]],"date-time":"2022-04-14T00:00:00Z","timestamp":1649894400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2022,4,14]],"date-time":"2022-04-14T00:00:00Z","timestamp":1649894400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/100006190","name":"Research and Development","doi-asserted-by":"publisher","id":[{"id":"10.13039\/100006190","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2022,4,14]]},"DOI":"10.1109\/nems54180.2022.9791194","type":"proceedings-article","created":{"date-parts":[[2022,6,10]],"date-time":"2022-06-10T21:35:38Z","timestamp":1654896938000},"page":"350-353","source":"Crossref","is-referenced-by-count":1,"title":["Preparation of 3D Alkali Vapor Cell with Vertical Sidewalls"],"prefix":"10.1109","author":[{"given":"Jin","family":"Zhang","sequence":"first","affiliation":[{"name":"Southeast University,The Key Laboratory of MEMS of the Ministry of Education,Nanjing,China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jianfeng","family":"Zhang","sequence":"additional","affiliation":[{"name":"Southeast University,The Key Laboratory of MEMS of the Ministry of Education,Nanjing,China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jintang","family":"Shang","sequence":"additional","affiliation":[{"name":"Southeast University,The Key Laboratory of MEMS of the Ministry of Education,Nanjing,China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/22\/2\/025013"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1016\/j.surfcoat.2013.01.044"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1038\/srep14001"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1088\/2515-7647\/abcbe5"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2007.10.006"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1063\/1.3491548"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.3390\/mi9040175"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1364\/OL.424354"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1063\/1.5026238"},{"key":"ref19","article-title":"Developments in alkali-metal atomic magnetometry","author":"seltzer","year":"2008","journal-title":"Ph D Dissertation Dept"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1038\/s41567-021-01392-z"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/TA.1963.4319483"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1038\/s41586-021-03571-7"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1016\/j.neuroimage.2019.05.063"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1016\/j.neuroimage.2020.117497"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1103\/RevModPhys.89.035002"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2011.2157679"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1038\/nature01484"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1063\/1.1691490"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1109\/LSENS.2020.2965737"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1146\/annurev.ms.09.080179.002105"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/22\/12\/125012"}],"event":{"name":"2022 IEEE 17th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2022,4,14]]},"location":"Taoyuan, Taiwan","end":{"date-parts":[[2022,4,17]]}},"container-title":["2022 IEEE 17th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/9791120\/9791087\/09791194.pdf?arnumber=9791194","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,7,4]],"date-time":"2022-07-04T20:09:29Z","timestamp":1656965369000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/9791194\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2022,4,14]]},"references-count":22,"URL":"https:\/\/doi.org\/10.1109\/nems54180.2022.9791194","relation":{},"subject":[],"published":{"date-parts":[[2022,4,14]]}}}