{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,27]],"date-time":"2026-03-27T16:45:34Z","timestamp":1774629934616,"version":"3.50.1"},"reference-count":18,"publisher":"IEEE","license":[{"start":{"date-parts":[[2023,5,14]],"date-time":"2023-05-14T00:00:00Z","timestamp":1684022400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2023,5,14]],"date-time":"2023-05-14T00:00:00Z","timestamp":1684022400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/100006190","name":"Research and Development","doi-asserted-by":"publisher","id":[{"id":"10.13039\/100006190","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2023,5,14]]},"DOI":"10.1109\/nems57332.2023.10190865","type":"proceedings-article","created":{"date-parts":[[2023,7,31]],"date-time":"2023-07-31T17:26:02Z","timestamp":1690824362000},"page":"140-143","source":"Crossref","is-referenced-by-count":3,"title":["An Opto-mechanical MEMS Accelerometer with Noise Floor of 40 ng\/Hz<sup>1\/2<\/sup>"],"prefix":"10.1109","author":[{"given":"Shimin","family":"Jiao","sequence":"first","affiliation":[{"name":"Huazhong University of Science and Technology,PGMF and School of Physics,Wuhan,China"}]},{"given":"Hao","family":"Ouyang","sequence":"additional","affiliation":[{"name":"Huazhong University of Science and Technology,PGMF and School of Physics,Wuhan,China"}]},{"given":"Ziqiang","family":"Qu","sequence":"additional","affiliation":[{"name":"Huazhong University of Science and Technology,PGMF and School of Physics,Wuhan,China"}]},{"given":"Qiu","family":"Wang","sequence":"additional","affiliation":[{"name":"Huazhong University of Science and Technology,PGMF and School of Physics,Wuhan,China"}]},{"given":"Huafeng","family":"Liu","sequence":"additional","affiliation":[{"name":"Huazhong University of Science and Technology,PGMF and School of Physics,Wuhan,China"}]},{"given":"Liang-Cheng","family":"Tu","sequence":"additional","affiliation":[{"name":"Sun Yat-sen University,TianQin Research Center for Gravitational Physics and School of Physics and Astronomy,Zhuhai,China"}]}],"member":"263","reference":[{"key":"ref13","doi-asserted-by":"crossref","first-page":"61102","DOI":"10.1103\/PhysRevLett.116.061102","article-title":"Observation of Gravitational Waves from a Binary Black Hole Merger","volume":"116","author":"abbott","year":"2016","journal-title":"Phys Rev Lett"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1038\/nphoton.2012.245"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1364\/OPTICA.413117"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevLett.97.133601"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1364\/FIO.2018.JW3A.88"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/MCOM.2013.6495768"},{"key":"ref2","first-page":"475","article-title":"Sideband cooling of micromechanical motion to the quantum ground state","author":"teufel","year":"2011","journal-title":"Nature"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1088\/1367-2630\/11\/7\/073032"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1364\/OL.443236"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2022.113874"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1364\/OE.25.015493"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1038\/s41378-023-00498-z"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2017.2693341"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1109\/MWSCAS.2010.5548828"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1126\/science.1156032"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1103\/RevModPhys.86.1391"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1038\/s41598-017-04882-4"},{"key":"ref5","author":"middlemiss","year":"2016","journal-title":"A practical MEMS gravimeter"}],"event":{"name":"2023 IEEE 18th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","location":"Jeju Island, Korea, Republic of","start":{"date-parts":[[2023,5,14]]},"end":{"date-parts":[[2023,5,17]]}},"container-title":["2023 IEEE 18th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/10190845\/10190847\/10190865.pdf?arnumber=10190865","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,8,21]],"date-time":"2023-08-21T17:41:27Z","timestamp":1692639687000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10190865\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,5,14]]},"references-count":18,"URL":"https:\/\/doi.org\/10.1109\/nems57332.2023.10190865","relation":{},"subject":[],"published":{"date-parts":[[2023,5,14]]}}}