{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,2,21]],"date-time":"2025-02-21T01:40:30Z","timestamp":1740102030971,"version":"3.37.3"},"reference-count":4,"publisher":"IEEE","license":[{"start":{"date-parts":[[2023,5,14]],"date-time":"2023-05-14T00:00:00Z","timestamp":1684022400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2023,5,14]],"date-time":"2023-05-14T00:00:00Z","timestamp":1684022400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2023,5,14]]},"DOI":"10.1109\/nems57332.2023.10190870","type":"proceedings-article","created":{"date-parts":[[2023,7,31]],"date-time":"2023-07-31T17:26:02Z","timestamp":1690824362000},"page":"205-208","source":"Crossref","is-referenced-by-count":0,"title":["A novel electrodes design for in-plane measurement of single-structure multi-axis MEMS inertial devices"],"prefix":"10.1109","author":[{"given":"Jianjun","family":"Ma","sequence":"first","affiliation":[{"name":"Tsinghua University, Haidian,Department of Precision Instrument,Beijing,China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Bowen","family":"Xing","sequence":"additional","affiliation":[{"name":"Tsinghua University, Haidian,Department of Precision Instrument,Beijing,China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jiayang","family":"Sun","sequence":"additional","affiliation":[{"name":"Tsinghua University, Haidian,Department of Precision Instrument,Beijing,China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Bin","family":"Zhou","sequence":"additional","affiliation":[{"name":"Tsinghua University, Haidian,Department of Precision Instrument,Beijing,China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Qi","family":"Wei","sequence":"additional","affiliation":[{"name":"Tsinghua University, Haidian,Department of Precision Instrument,Beijing,China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Rong","family":"Zhang","sequence":"additional","affiliation":[{"name":"Tsinghua University, Haidian,Department of Precision Instrument,Beijing,China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2021.3078375"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/INERTIAL48129.2020.9090013"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/LED.2015.2454511"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.3390\/mi10060410"}],"event":{"name":"2023 IEEE 18th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","start":{"date-parts":[[2023,5,14]]},"location":"Jeju Island, Korea, Republic of","end":{"date-parts":[[2023,5,17]]}},"container-title":["2023 IEEE 18th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/10190845\/10190847\/10190870.pdf?arnumber=10190870","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,8,21]],"date-time":"2023-08-21T17:41:28Z","timestamp":1692639688000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10190870\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,5,14]]},"references-count":4,"URL":"https:\/\/doi.org\/10.1109\/nems57332.2023.10190870","relation":{},"subject":[],"published":{"date-parts":[[2023,5,14]]}}}