{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,19]],"date-time":"2026-02-19T02:07:33Z","timestamp":1771466853015,"version":"3.50.1"},"reference-count":8,"publisher":"IEEE","license":[{"start":{"date-parts":[[2023,5,14]],"date-time":"2023-05-14T00:00:00Z","timestamp":1684022400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2023,5,14]],"date-time":"2023-05-14T00:00:00Z","timestamp":1684022400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2023,5,14]]},"DOI":"10.1109\/nems57332.2023.10190892","type":"proceedings-article","created":{"date-parts":[[2023,7,31]],"date-time":"2023-07-31T13:26:02Z","timestamp":1690809962000},"page":"128-131","source":"Crossref","is-referenced-by-count":1,"title":["A micro and low-cost packaging technology of high accuracy piezoresistive pressure sensors with Parylene coating"],"prefix":"10.1109","author":[{"given":"Shaoxiao","family":"Nie","sequence":"first","affiliation":[{"name":"Peking University,School of Integrated Circuits,Beijing,China"}]},{"given":"Yilong","family":"Hao","sequence":"additional","affiliation":[{"name":"Peking University,School of Integrated Circuits,Beijing,China"}]},{"given":"Fanrui","family":"Meng","sequence":"additional","affiliation":[{"name":"Peking University,School of Integrated Circuits,Beijing,China"}]},{"given":"Chenhchen","family":"Gao","sequence":"additional","affiliation":[{"name":"Peking University,School of Integrated Circuits,Beijing,China"}]},{"given":"Zhenchuan","family":"Yang","sequence":"additional","affiliation":[{"name":"Peking University,School of Integrated Circuits,Beijing,China"}]}],"member":"263","reference":[{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1116\/1.5011790"},{"key":"ref7","doi-asserted-by":"crossref","first-page":"42","DOI":"10.1103\/PhysRev.94.42","article-title":"Piezoresistive Effect in Germanium and Silicon","volume":"94","author":"charles","year":"1954","journal-title":"Physical Review"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.4028\/www.scientific.net\/KEM.437.397"},{"key":"ref3","first-page":"29","article-title":"Sensitivity analysis of packaging effect of silicon-based piezoresistive pressure sensor","volume":"152","author":"chou","year":"2009","journal-title":"Key Engineering Materials"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1007\/s10544-011-9601-z"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1021\/acsomega.0c02897"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/ICEPT.2010.5582815"},{"key":"ref1","doi-asserted-by":"crossref","first-page":"151","DOI":"10.1016\/j.sna.2014.12.033","article-title":"Fabrication of electron beam physical vapor deposited polysilicon piezoresistive MEMS pressure sensor","volume":"223","author":"kulwant","year":"2015","journal-title":"Sensors & Actuators A Physical"}],"event":{"name":"2023 IEEE 18th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)","location":"Jeju Island, Korea, Republic of","start":{"date-parts":[[2023,5,14]]},"end":{"date-parts":[[2023,5,17]]}},"container-title":["2023 IEEE 18th International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/10190845\/10190847\/10190892.pdf?arnumber=10190892","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,8,21]],"date-time":"2023-08-21T13:41:30Z","timestamp":1692625290000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10190892\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,5,14]]},"references-count":8,"URL":"https:\/\/doi.org\/10.1109\/nems57332.2023.10190892","relation":{},"subject":[],"published":{"date-parts":[[2023,5,14]]}}}