{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,7]],"date-time":"2024-09-07T23:27:09Z","timestamp":1725751629777},"reference-count":12,"publisher":"IEEE","license":[{"start":{"date-parts":[[2023,6,26]],"date-time":"2023-06-26T00:00:00Z","timestamp":1687737600000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2023,6,26]],"date-time":"2023-06-26T00:00:00Z","timestamp":1687737600000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2023,6,26]]},"DOI":"10.1109\/newcas57931.2023.10198185","type":"proceedings-article","created":{"date-parts":[[2023,8,7]],"date-time":"2023-08-07T13:49:33Z","timestamp":1691416173000},"page":"1-4","source":"Crossref","is-referenced-by-count":1,"title":["Toward a Polysilicon-Based Electrostatically Actuated DC MEMS Switch"],"prefix":"10.1109","author":[{"given":"Abdurrashid Hassan","family":"Shuaibu","sequence":"first","affiliation":[{"name":"École de Technologie Supérieure,Department of Electrical Engineering,Montréal,Québec"}]},{"given":"Yves","family":"Blaqui\u00e8re","sequence":"additional","affiliation":[{"name":"École de Technologie Supérieure,Department of Electrical Engineering,Montréal,Québec"}]},{"given":"Fr\u00e9d\u00e9ric","family":"Nabki","sequence":"additional","affiliation":[{"name":"École de Technologie Supérieure,Department of Electrical Engineering,Montréal,Québec"}]}],"member":"263","reference":[{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/TIA.2012.2199949"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSC.2001.992733"},{"article-title":"PolyMUMPs Design Handbook","year":"0","author":"cowen","key":"ref12"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-015-2660-y"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/6668.969936"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/NEWCAS52662.2022.9842102"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/MWSYM.2012.6258368"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1016\/j.microrel.2021.114372"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/MMM.2012.2226540"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/NEMS51815.2021.9451411"},{"article-title":"An Electrothermally-Actuated Bistable MEMS Relay for Power Applications","year":"2003","author":"qiu","key":"ref2"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/JPROC.1998.658762"}],"event":{"name":"2023 21st IEEE Interregional NEWCAS Conference (NEWCAS)","start":{"date-parts":[[2023,6,26]]},"location":"Edinburgh, United Kingdom","end":{"date-parts":[[2023,6,28]]}},"container-title":["2023 21st IEEE Interregional NEWCAS Conference (NEWCAS)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/10198027\/10198028\/10198185.pdf?arnumber=10198185","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,8,28]],"date-time":"2023-08-28T13:41:08Z","timestamp":1693230068000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10198185\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,6,26]]},"references-count":12,"URL":"https:\/\/doi.org\/10.1109\/newcas57931.2023.10198185","relation":{},"subject":[],"published":{"date-parts":[[2023,6,26]]}}}