{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,30]],"date-time":"2024-10-30T12:16:54Z","timestamp":1730290614026,"version":"3.28.0"},"reference-count":13,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2018,7]]},"DOI":"10.1109\/prime.2018.8430365","type":"proceedings-article","created":{"date-parts":[[2018,8,17]],"date-time":"2018-08-17T19:56:49Z","timestamp":1534535809000},"page":"53-56","source":"Crossref","is-referenced-by-count":0,"title":["A Bayesian indicator for Run-to-Run performance assessment in semiconductor manufacturing"],"prefix":"10.1109","author":[{"given":"Taki Eddine","family":"KORABI","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Guillaume","family":"Graton","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"El Mostafa","family":"El Adel","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Mustapha","family":"Ouladsine","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jacques","family":"Pinaton","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1016\/S0967-0661(03)00154-0"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1023\/A:1018577817064"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1016\/j.rcim.2011.06.007"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2007.895216"},{"journal-title":"Run-to-run Control Process for Controlling Critical Dimensions","year":"1999","author":"toprac","key":"ref4"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/3476.558560"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1016\/j.jprocont.2005.06.002"},{"key":"ref5","volume":"200","author":"moyne","year":"2001","journal-title":"Run-to-Run control in semiconductor manufacturing"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1016\/S0005-1098(00)00084-4"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/66.175363"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1080\/00224065.1997.11979749"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1002\/0471790281"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1002\/qre.489"}],"event":{"name":"2018 14th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME)","start":{"date-parts":[[2018,7,2]]},"location":"Prague","end":{"date-parts":[[2018,7,5]]}},"container-title":["2018 14th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8410979\/8430100\/08430365.pdf?arnumber=8430365","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2020,8,24]],"date-time":"2020-08-24T03:03:55Z","timestamp":1598238235000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/8430365\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2018,7]]},"references-count":13,"URL":"https:\/\/doi.org\/10.1109\/prime.2018.8430365","relation":{},"subject":[],"published":{"date-parts":[[2018,7]]}}}