{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,9,12]],"date-time":"2025-09-12T18:39:18Z","timestamp":1757702358251,"version":"3.28.0"},"reference-count":12,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"DOI":"10.1109\/robot.2006.1641848","type":"proceedings-article","created":{"date-parts":[[2006,7,10]],"date-time":"2006-07-10T19:59:56Z","timestamp":1152561596000},"page":"1048-1053","source":"Crossref","is-referenced-by-count":4,"title":["Multivariate simulation assessment for virtual metrology"],"prefix":"10.1109","author":[{"family":"Yeh-Tung Chen","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Haw-Ching Yang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Fan-Tien Cheng","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/37.736011"},{"key":"2","article-title":"Application development of virtual metrology in semiconductor industry","author":"chang","year":"2005","journal-title":"IEEE IECON"},{"key":"10","first-page":"211","article-title":"An analysis of transformations","volume":"26","author":"box","year":"1964","journal-title":"Journal of the Royal Statistical Society Series B"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1109\/ASMC.1995.484339"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1109\/21.44023"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1109\/TMTT.2002.806910"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1109\/PPC.2003.1277678"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1109\/IEMT.1993.398164"},{"journal-title":"Introduction to Statistics Concepts and Applications","year":"1994","author":"anderson","key":"9"},{"journal-title":"Simulation A Modeler's Approach","year":"2000","author":"thompson","key":"8"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1061\/(ASCE)0887-3801(2001)15:4(299)"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1016\/j.ecolmodel.2004.07.015"}],"event":{"name":"2006 IEEE International Conference on Robotics and Automation, 2006. ICRA 2006.","location":"Orlando, FL, USA"},"container-title":["Proceedings 2006 IEEE International Conference on Robotics and Automation, 2006. ICRA 2006."],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/10932\/34383\/01641848.pdf?arnumber=1641848","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,15]],"date-time":"2017-03-15T22:23:05Z","timestamp":1489616585000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/1641848\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[null]]},"references-count":12,"URL":"https:\/\/doi.org\/10.1109\/robot.2006.1641848","relation":{},"subject":[]}}