{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,4]],"date-time":"2024-09-04T01:43:39Z","timestamp":1725414219564},"reference-count":13,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2008,5]]},"DOI":"10.1109\/robot.2008.4543767","type":"proceedings-article","created":{"date-parts":[[2008,6,16]],"date-time":"2008-06-16T14:43:38Z","timestamp":1213627418000},"page":"3630-3635","source":"Crossref","is-referenced-by-count":1,"title":["Development of a dual-stage virtual metrology architecture for TFT-LCD manufacturing"],"prefix":"10.1109","author":[{"family":"Yu-Chuan Su","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Wen-Huang Tsai","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Fan-Tien Cheng","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"family":"Wei-Ming Wu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"13","doi-asserted-by":"publisher","DOI":"10.1109\/ROBOT.2007.363551"},{"key":"11","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2006.873514"},{"key":"12","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2006.873512"},{"key":"3","doi-asserted-by":"publisher","DOI":"10.1109\/66.216928"},{"key":"2","doi-asserted-by":"publisher","DOI":"10.1109\/66.400999"},{"key":"1","doi-asserted-by":"publisher","DOI":"10.1109\/TSM.2003.818976"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.1109\/IJCNN.2006.247284"},{"key":"7","doi-asserted-by":"publisher","DOI":"10.1016\/S0169-4332(03)00963-2"},{"key":"6","doi-asserted-by":"publisher","DOI":"10.1109\/66.892633"},{"key":"5","doi-asserted-by":"publisher","DOI":"10.1109\/72.134286"},{"key":"4","doi-asserted-by":"publisher","DOI":"10.1109\/66.286829"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2007.897275"},{"key":"8","doi-asserted-by":"publisher","DOI":"10.1109\/66.572084"}],"event":{"name":"2008 IEEE International Conference on Robotics and Automation (ICRA)","start":{"date-parts":[[2008,5,19]]},"location":"Pasadena, CA, USA","end":{"date-parts":[[2008,5,23]]}},"container-title":["2008 IEEE International Conference on Robotics and Automation"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/4534525\/4543169\/04543767.pdf?arnumber=4543767","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,16]],"date-time":"2017-03-16T12:05:58Z","timestamp":1489665958000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/4543767\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2008,5]]},"references-count":13,"URL":"https:\/\/doi.org\/10.1109\/robot.2008.4543767","relation":{},"subject":[],"published":{"date-parts":[[2008,5]]}}}