{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,9,2]],"date-time":"2025-09-02T00:03:51Z","timestamp":1756771431165,"version":"3.44.0"},"reference-count":15,"publisher":"IEEE","license":[{"start":{"date-parts":[[2019,10,1]],"date-time":"2019-10-01T00:00:00Z","timestamp":1569888000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2019,10,1]],"date-time":"2019-10-01T00:00:00Z","timestamp":1569888000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2019,10]]},"DOI":"10.1109\/sensors43011.2019.8956489","type":"proceedings-article","created":{"date-parts":[[2020,1,15]],"date-time":"2020-01-15T03:50:51Z","timestamp":1579060251000},"page":"1-4","source":"Crossref","is-referenced-by-count":2,"title":["Micro Humidity Sensor Using ALD Zirconium Oxide for Low Frequency Applications"],"prefix":"10.1109","author":[{"family":"Izhar","sequence":"first","affiliation":[{"name":"The Hong Kong University of Science and Technology,Department of Mechanical and Aerospace Engineering,Hong Kong"}]},{"given":"Xiaoyi","family":"Wang","sequence":"additional","affiliation":[{"name":"The Hong Kong University of Science and Technology,Department of Mechanical and Aerospace Engineering,Hong Kong"}]},{"given":"Wei","family":"Xu","sequence":"additional","affiliation":[{"name":"The Hong Kong University of Science and Technology,Department of Mechanical and Aerospace Engineering,Hong Kong"}]},{"given":"Yi-Kuen","family":"Lee","sequence":"additional","affiliation":[{"name":"The Hong Kong University of Science and Technology,Department of Mechanical and Aerospace Engineering,Hong Kong"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/LED.2016.2521001"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1007\/s11051-018-4442-9"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1088\/1361-6641\/aaaa5f"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1002\/adfm.200900588"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1063\/1.4815970"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1021\/ja800176s"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1039\/C0JM02753G"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1021\/jp3080223"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2012.05.041"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.3390\/s140304177"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1016\/S0925-4005(01)00932-7"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1166\/sl.2011.1588"},{"key":"ref2","doi-asserted-by":"crossref","first-page":"1","DOI":"10.3390\/s18051516","article-title":"Polyimide-based capacitive humidity sensor","volume":"18","author":"boudaden","year":"2018","journal-title":"Sensors (Switzerland)"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1016\/j.snb.2009.03.070"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1088\/0031-8949\/2010\/T139\/014055"}],"event":{"name":"2019 IEEE SENSORS","start":{"date-parts":[[2019,10,27]]},"location":"Montreal, QC, Canada","end":{"date-parts":[[2019,10,30]]}},"container-title":["2019 IEEE SENSORS"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8949872\/8956486\/08956489.pdf?arnumber=8956489","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,9,1]],"date-time":"2025-09-01T19:21:43Z","timestamp":1756754503000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/8956489\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019,10]]},"references-count":15,"URL":"https:\/\/doi.org\/10.1109\/sensors43011.2019.8956489","relation":{},"subject":[],"published":{"date-parts":[[2019,10]]}}}