{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,8,23]],"date-time":"2025-08-23T01:10:03Z","timestamp":1755911403909,"version":"3.44.0"},"reference-count":13,"publisher":"IEEE","license":[{"start":{"date-parts":[[2019,10,1]],"date-time":"2019-10-01T00:00:00Z","timestamp":1569888000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2019,10,1]],"date-time":"2019-10-01T00:00:00Z","timestamp":1569888000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2019,10]]},"DOI":"10.1109\/sensors43011.2019.8956512","type":"proceedings-article","created":{"date-parts":[[2020,1,15]],"date-time":"2020-01-15T03:50:51Z","timestamp":1579060251000},"page":"1-4","source":"Crossref","is-referenced-by-count":4,"title":["High-Performance MEMS Pressure Sensor Fully-Integrated with a 3-Axis Accelerometer"],"prefix":"10.1109","author":[{"given":"Fr\u00e9d\u00e9ric","family":"Souchon","sequence":"first","affiliation":[{"name":"Univ. Grenoble Alpes,CEA, LETI,Grenoble,France,38000"}]},{"given":"Loic","family":"Joet","sequence":"additional","affiliation":[{"name":"Univ. Grenoble Alpes,CEA, LETI,Grenoble,France,38000"}]},{"given":"Carine","family":"Ladner","sequence":"additional","affiliation":[{"name":"Univ. Grenoble Alpes,CEA, LETI,Grenoble,France,38000"}]},{"given":"Patrice","family":"Rey","sequence":"additional","affiliation":[{"name":"Univ. Grenoble Alpes,CEA, LETI,Grenoble,France,38000"}]},{"given":"Stephan","family":"Louwers","sequence":"additional","affiliation":[{"name":"Univ. Grenoble Alpes,CEA, LETI,Grenoble,France,38000"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/ICSENS.2009.5398195"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2013.2273362"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2015.2441142"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.2018.8346531"},{"key":"ref4","first-page":"120","article-title":"A Critical Review of MEMS Capacitive Pressure Sensors","volume":"187","author":"balavalad","year":"2015","journal-title":"Sensors & Transducers"},{"key":"ref3","first-page":"23","article-title":"MEMS Piezoresistive Pressure Sensor: A Survey","volume":"6","author":"meti","year":"2016","journal-title":"Journal of Engineering Research and Applications"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1016\/j.measurement.2014.11.032"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.4218\/etrij.16.0015.0025"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.2016.7421762"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2015.03.008"},{"key":"ref2","first-page":"1","article-title":"MEMS Pressure Sensors - An Overview of Challenges in Technology and Packaging","author":"bhat","year":"2012","journal-title":"Smart Mater Struct"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1088\/0964-1726\/6\/5\/004"},{"key":"ref9","article-title":"M&NEMS:A Generic Platform for Ultra-Miniaturized, low-Power and Low-Cost Sensors","author":"lequepeys","year":"2013","journal-title":"Leti Day"}],"event":{"name":"2019 IEEE SENSORS","start":{"date-parts":[[2019,10,27]]},"location":"Montreal, QC, Canada","end":{"date-parts":[[2019,10,30]]}},"container-title":["2019 IEEE SENSORS"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8949872\/8956486\/08956512.pdf?arnumber=8956512","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,8,23]],"date-time":"2025-08-23T00:43:53Z","timestamp":1755909833000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/8956512\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019,10]]},"references-count":13,"URL":"https:\/\/doi.org\/10.1109\/sensors43011.2019.8956512","relation":{},"subject":[],"published":{"date-parts":[[2019,10]]}}}